Abstract
This study investigated effects of vacuum ultraviolet (VUV) illumination on the residual stress of sol-gel-derived titanium dioxide (TiO2) films. After firing at 500°C, VUV pre-illumination to TiO2 precursor film decreases residual stress more than 30%. This effect is explained by the great shrinkage that occurs during VUV illumination.
Original language | English |
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Pages (from-to) | 106-107 |
Number of pages | 2 |
Journal | Chemistry Letters |
Volume | 36 |
Issue number | 1 |
DOIs | |
Publication status | Published - Jan 5 2007 |
Externally published | Yes |
ASJC Scopus subject areas
- Chemistry(all)