Effects of vacuum ultraviolet light illumination on the residual stress in sol-gel-derived titanium dioxide films

Naoki Arimitsu; Akira Nakajima; Keisuke Saito; Yoshikazu Kameshima; Kiyoshi Okada

doi:10.1246/cl.2007.106

Effects of vacuum ultraviolet light illumination on the residual stress in sol-gel-derived titanium dioxide films

Naoki Arimitsu, Akira Nakajima, Keisuke Saito, Yoshikazu Kameshima, Kiyoshi Okada

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

This study investigated effects of vacuum ultraviolet (VUV) illumination on the residual stress of sol-gel-derived titanium dioxide (TiO₂) films. After firing at 500°C, VUV pre-illumination to TiO₂ precursor film decreases residual stress more than 30%. This effect is explained by the great shrinkage that occurs during VUV illumination.

Original language	English
Pages (from-to)	106-107
Number of pages	2
Journal	Chemistry Letters
Volume	36
Issue number	1
DOIs	https://doi.org/10.1246/cl.2007.106
Publication status	Published - Jan 5 2007
Externally published	Yes

ASJC Scopus subject areas

Chemistry(all)

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abstract = "This study investigated effects of vacuum ultraviolet (VUV) illumination on the residual stress of sol-gel-derived titanium dioxide (TiO2) films. After firing at 500°C, VUV pre-illumination to TiO2 precursor film decreases residual stress more than 30%. This effect is explained by the great shrinkage that occurs during VUV illumination.",

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