Abstract
This study investigated effects of vacuum ultraviolet (VUV) illumination on the residual stress of sol-gel-derived titanium dioxide (TiO2) films. After firing at 500°C, VUV pre-illumination to TiO2 precursor film decreases residual stress more than 30%. This effect is explained by the great shrinkage that occurs during VUV illumination.
| Original language | English |
|---|---|
| Pages (from-to) | 106-107 |
| Number of pages | 2 |
| Journal | Chemistry Letters |
| Volume | 36 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - Jan 5 2007 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Chemistry(all)
Cite this
Effects of vacuum ultraviolet light illumination on the residual stress in sol-gel-derived titanium dioxide films. / Arimitsu, Naoki; Nakajima, Akira; Saito, Keisuke; Kameshima, Yoshikazu; Okada, Kiyoshi.
In: Chemistry Letters, Vol. 36, No. 1, 05.01.2007, p. 106-107.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Effects of vacuum ultraviolet light illumination on the residual stress in sol-gel-derived titanium dioxide films
AU - Arimitsu, Naoki
AU - Nakajima, Akira
AU - Saito, Keisuke
AU - Kameshima, Yoshikazu
AU - Okada, Kiyoshi
PY - 2007/1/5
Y1 - 2007/1/5
N2 - This study investigated effects of vacuum ultraviolet (VUV) illumination on the residual stress of sol-gel-derived titanium dioxide (TiO2) films. After firing at 500°C, VUV pre-illumination to TiO2 precursor film decreases residual stress more than 30%. This effect is explained by the great shrinkage that occurs during VUV illumination.
AB - This study investigated effects of vacuum ultraviolet (VUV) illumination on the residual stress of sol-gel-derived titanium dioxide (TiO2) films. After firing at 500°C, VUV pre-illumination to TiO2 precursor film decreases residual stress more than 30%. This effect is explained by the great shrinkage that occurs during VUV illumination.
UR - http://www.scopus.com/inward/record.url?scp=34247247782&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34247247782&partnerID=8YFLogxK
U2 - 10.1246/cl.2007.106
DO - 10.1246/cl.2007.106
M3 - Article
AN - SCOPUS:34247247782
VL - 36
SP - 106
EP - 107
JO - Chemistry Letters
JF - Chemistry Letters
SN - 0366-7022
IS - 1
ER -