Effects of vacuum ultraviolet light illumination on the residual stress in sol-gel-derived titanium dioxide films

Naoki Arimitsu, Akira Nakajima, Keisuke Saito, Yoshikazu Kameshima, Kiyoshi Okada

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

This study investigated effects of vacuum ultraviolet (VUV) illumination on the residual stress of sol-gel-derived titanium dioxide (TiO2) films. After firing at 500°C, VUV pre-illumination to TiO2 precursor film decreases residual stress more than 30%. This effect is explained by the great shrinkage that occurs during VUV illumination.

Original languageEnglish
Pages (from-to)106-107
Number of pages2
JournalChemistry Letters
Volume36
Issue number1
DOIs
Publication statusPublished - Jan 5 2007
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)

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