Effects of SR irradiation on tin-doped indium oxide thin film prepared by rf magnetron sputtering

M. Sasaki, Katsumi Hanamoto, Y. Kimura, C. Kaito, H. Miki, Y. Nakayama

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1384
Number of pages1
JournalReview of Scientific Instruments
Volume73
Issue number3 II
DOIs
Publication statusPublished - Mar 2002
Externally publishedYes

Fingerprint

indium oxides
Magnetron sputtering
Indium
Tin
Oxide films
tin
magnetron sputtering
Irradiation
Thin films
irradiation
thin films

ASJC Scopus subject areas

  • Instrumentation
  • Physics and Astronomy (miscellaneous)

Cite this

Effects of SR irradiation on tin-doped indium oxide thin film prepared by rf magnetron sputtering. / Sasaki, M.; Hanamoto, Katsumi; Kimura, Y.; Kaito, C.; Miki, H.; Nakayama, Y.

In: Review of Scientific Instruments, Vol. 73, No. 3 II, 03.2002, p. 1384.

Research output: Contribution to journalArticle

Sasaki, M. ; Hanamoto, Katsumi ; Kimura, Y. ; Kaito, C. ; Miki, H. ; Nakayama, Y. / Effects of SR irradiation on tin-doped indium oxide thin film prepared by rf magnetron sputtering. In: Review of Scientific Instruments. 2002 ; Vol. 73, No. 3 II. pp. 1384.
@article{393cb78f334d4ecabc22d44c90b99580,
title = "Effects of SR irradiation on tin-doped indium oxide thin film prepared by rf magnetron sputtering",
author = "M. Sasaki and Katsumi Hanamoto and Y. Kimura and C. Kaito and H. Miki and Y. Nakayama",
year = "2002",
month = "3",
doi = "10.1063/1.1423624",
language = "English",
volume = "73",
pages = "1384",
journal = "Review of Scientific Instruments",
issn = "0034-6748",
publisher = "American Institute of Physics Publising LLC",
number = "3 II",

}

TY - JOUR

T1 - Effects of SR irradiation on tin-doped indium oxide thin film prepared by rf magnetron sputtering

AU - Sasaki, M.

AU - Hanamoto, Katsumi

AU - Kimura, Y.

AU - Kaito, C.

AU - Miki, H.

AU - Nakayama, Y.

PY - 2002/3

Y1 - 2002/3

UR - http://www.scopus.com/inward/record.url?scp=0036494084&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036494084&partnerID=8YFLogxK

U2 - 10.1063/1.1423624

DO - 10.1063/1.1423624

M3 - Article

AN - SCOPUS:0036494084

VL - 73

SP - 1384

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

SN - 0034-6748

IS - 3 II

ER -