Effects of SR irradiation on tin-doped indium oxide thin film prepared by rf magnetron sputtering

M. Sasaki, Katsumi Hanamoto, Y. Kimura, C. Kaito, H. Miki, Y. Nakayama

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1384
Number of pages1
JournalReview of Scientific Instruments
Volume73
Issue number3 II
DOIs
Publication statusPublished - Mar 2002
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation
  • Physics and Astronomy (miscellaneous)

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