Effects of laser wavelength and intensity distribution on removal characteristics of TCO film

Naoya Takahashi, Yasuhiro Okamoto, Shin Ichi Nakashiba, Tomokazu Sakagawa, Akira Okada, Yoshiyuki Uno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The effects of laser wavelength and intensity distribution on the removal characteristics of TCO films were experimentally investigated. The top-hat laser beam required the higher pulse energy rather than Gaussian laser beam to perform an acceptable scribed groove. The region of laser fluence to obtain an acceptable groove became wider in the case of top-hat laser beam compared with Gaussian laser beam, and the longer wavelength would lead to the wider acceptable fluence region. The burr height at the edge of groove could be reduced by the top-hat laser beam and the shorter laser wavelength.

Original languageEnglish
Title of host publicationProceedings of the 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011
Publication statusPublished - 2011
Event6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011 - Omiya Sonic City, Saitama, Japan
Duration: Nov 8 2011Nov 10 2011

Other

Other6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011
CountryJapan
CityOmiya Sonic City, Saitama
Period11/8/1111/10/11

Fingerprint

Laser beams
Wavelength
Lasers
Laser pulses

Keywords

  • Intensity distribution
  • Laser
  • Scribing
  • TCO film
  • Wavelength

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

Cite this

Takahashi, N., Okamoto, Y., Nakashiba, S. I., Sakagawa, T., Okada, A., & Uno, Y. (2011). Effects of laser wavelength and intensity distribution on removal characteristics of TCO film. In Proceedings of the 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011

Effects of laser wavelength and intensity distribution on removal characteristics of TCO film. / Takahashi, Naoya; Okamoto, Yasuhiro; Nakashiba, Shin Ichi; Sakagawa, Tomokazu; Okada, Akira; Uno, Yoshiyuki.

Proceedings of the 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011. 2011.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Takahashi, N, Okamoto, Y, Nakashiba, SI, Sakagawa, T, Okada, A & Uno, Y 2011, Effects of laser wavelength and intensity distribution on removal characteristics of TCO film. in Proceedings of the 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011. 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011, Omiya Sonic City, Saitama, Japan, 11/8/11.
Takahashi N, Okamoto Y, Nakashiba SI, Sakagawa T, Okada A, Uno Y. Effects of laser wavelength and intensity distribution on removal characteristics of TCO film. In Proceedings of the 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011. 2011
Takahashi, Naoya ; Okamoto, Yasuhiro ; Nakashiba, Shin Ichi ; Sakagawa, Tomokazu ; Okada, Akira ; Uno, Yoshiyuki. / Effects of laser wavelength and intensity distribution on removal characteristics of TCO film. Proceedings of the 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011. 2011.
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AU - Uno, Yoshiyuki

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