Effects of laser wavelength and intensity distribution on removal characteristics of TCO film

Naoya Takahashi, Yasuhiro Okamoto, Shin Ichi Nakashiba, Tomokazu Sakagawa, Akira Okada, Yoshiyuki Uno

Research output: Contribution to conferencePaper

Abstract

The effects of laser wavelength and intensity distribution on the removal characteristics of TCO films were experimentally investigated. The top-hat laser beam required the higher pulse energy rather than Gaussian laser beam to perform an acceptable scribed groove. The region of laser fluence to obtain an acceptable groove became wider in the case of top-hat laser beam compared with Gaussian laser beam, and the longer wavelength would lead to the wider acceptable fluence region. The burr height at the edge of groove could be reduced by the top-hat laser beam and the shorter laser wavelength.

Original languageEnglish
Publication statusPublished - Dec 1 2011
Event6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011 - Omiya Sonic City, Saitama, Japan
Duration: Nov 8 2011Nov 10 2011

Other

Other6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011
CountryJapan
CityOmiya Sonic City, Saitama
Period11/8/1111/10/11

Keywords

  • Intensity distribution
  • Laser
  • Scribing
  • TCO film
  • Wavelength

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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  • Cite this

    Takahashi, N., Okamoto, Y., Nakashiba, S. I., Sakagawa, T., Okada, A., & Uno, Y. (2011). Effects of laser wavelength and intensity distribution on removal characteristics of TCO film. Paper presented at 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011, Omiya Sonic City, Saitama, Japan.