Effects of laser wavelength and intensity distribution on removal characteristics of TCO film

Naoya Takahashi; Yasuhiro Okamoto; Shin Ichi Nakashiba; Tomokazu Sakagawa; Akira Okada; Yoshiyuki Uno

Effects of laser wavelength and intensity distribution on removal characteristics of TCO film

Naoya Takahashi, Yasuhiro Okamoto, Shin Ichi Nakashiba, Tomokazu Sakagawa, Akira Okada, Yoshiyuki Uno

Research output: Contribution to conference › Paper › peer-review

Abstract

The effects of laser wavelength and intensity distribution on the removal characteristics of TCO films were experimentally investigated. The top-hat laser beam required the higher pulse energy rather than Gaussian laser beam to perform an acceptable scribed groove. The region of laser fluence to obtain an acceptable groove became wider in the case of top-hat laser beam compared with Gaussian laser beam, and the longer wavelength would lead to the wider acceptable fluence region. The burr height at the edge of groove could be reduced by the top-hat laser beam and the shorter laser wavelength.

Original language	English
Publication status	Published - Dec 1 2011
Event	6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011 - Omiya Sonic City, Saitama, Japan Duration: Nov 8 2011 → Nov 10 2011

Other

Other	6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011
Country/Territory	Japan
City	Omiya Sonic City, Saitama
Period	11/8/11 → 11/10/11

Keywords

Intensity distribution
Laser
Scribing
TCO film
Wavelength

ASJC Scopus subject areas

Industrial and Manufacturing Engineering

Cite this

Effects of laser wavelength and intensity distribution on removal characteristics of TCO film. / Takahashi, Naoya; Okamoto, Yasuhiro; Nakashiba, Shin Ichi et al.

2011. Paper presented at 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011, Omiya Sonic City, Saitama, Japan.

Research output: Contribution to conference › Paper › peer-review

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title = "Effects of laser wavelength and intensity distribution on removal characteristics of TCO film",

abstract = "The effects of laser wavelength and intensity distribution on the removal characteristics of TCO films were experimentally investigated. The top-hat laser beam required the higher pulse energy rather than Gaussian laser beam to perform an acceptable scribed groove. The region of laser fluence to obtain an acceptable groove became wider in the case of top-hat laser beam compared with Gaussian laser beam, and the longer wavelength would lead to the wider acceptable fluence region. The burr height at the edge of groove could be reduced by the top-hat laser beam and the shorter laser wavelength.",

keywords = "Intensity distribution, Laser, Scribing, TCO film, Wavelength",

author = "Naoya Takahashi and Yasuhiro Okamoto and Nakashiba, {Shin Ichi} and Tomokazu Sakagawa and Akira Okada and Yoshiyuki Uno",

year = "2011",

month = dec,

day = "1",

language = "English",

note = "6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011 ; Conference date: 08-11-2011 Through 10-11-2011",

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T1 - Effects of laser wavelength and intensity distribution on removal characteristics of TCO film

AU - Takahashi, Naoya

AU - Okamoto, Yasuhiro

AU - Nakashiba, Shin Ichi

AU - Sakagawa, Tomokazu

AU - Okada, Akira

AU - Uno, Yoshiyuki

PY - 2011/12/1

Y1 - 2011/12/1

N2 - The effects of laser wavelength and intensity distribution on the removal characteristics of TCO films were experimentally investigated. The top-hat laser beam required the higher pulse energy rather than Gaussian laser beam to perform an acceptable scribed groove. The region of laser fluence to obtain an acceptable groove became wider in the case of top-hat laser beam compared with Gaussian laser beam, and the longer wavelength would lead to the wider acceptable fluence region. The burr height at the edge of groove could be reduced by the top-hat laser beam and the shorter laser wavelength.

AB - The effects of laser wavelength and intensity distribution on the removal characteristics of TCO films were experimentally investigated. The top-hat laser beam required the higher pulse energy rather than Gaussian laser beam to perform an acceptable scribed groove. The region of laser fluence to obtain an acceptable groove became wider in the case of top-hat laser beam compared with Gaussian laser beam, and the longer wavelength would lead to the wider acceptable fluence region. The burr height at the edge of groove could be reduced by the top-hat laser beam and the shorter laser wavelength.

KW - Intensity distribution

KW - Laser

KW - Scribing

KW - TCO film

KW - Wavelength

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M3 - Paper

AN - SCOPUS:84883439543

T2 - 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011

Y2 - 8 November 2011 through 10 November 2011

ER -

Effects of laser wavelength and intensity distribution on removal characteristics of TCO film

Abstract

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Keywords

ASJC Scopus subject areas

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