Effects of carbon implantation on the electrical properties of amorphous In2O3 thin film

K. Hanamoto, M. Sasaki, H. Miki, Y. Nakayama

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Fingerprint Dive into the research topics of 'Effects of carbon implantation on the electrical properties of amorphous In<sub>2</sub>O<sub>3</sub> thin film'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy