Effects of back electromotive force in an absolute displacement sensor and improvement using current-feedback-type driver

Takashi Kai, Masaya Akiyama, Yukinori Nakamura, Shinji Wakui

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

An absolute displacement sensor, which can simultaneously detect acceleration, velocity, and displacement signals, has been proposed for vibration control of semiconductor manufacturing equipments. Based on state feedback, a control model of the sensor is previously designed in order to calculate the feedback gains using optimal regulator. However, characteristics in simulations have been different from experiments in low frequency region. This difference is due to modeling of a driver circuit. In this paper, a voltage-feedback-type driver is replaced by a current-feedback-type driver in actual circuits of the sensor. The latter driver can ignore the effect of back electromotive force from a forcer coil. After the driver and the force are remodeled, simulation parameters are identified. As a result, the simulations are corresponding to the experiments.

Original languageEnglish
Title of host publication2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program
Pages373-378
Number of pages6
Publication statusPublished - 2011
Externally publishedYes
Event2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Zhengzhou, China
Duration: Aug 11 2011Aug 13 2011

Other

Other2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011
CountryChina
CityZhengzhou
Period8/11/118/13/11

Fingerprint

Electromotive force
Feedback
Sensors
Networks (circuits)
Vibration control
State feedback
Experiments
Semiconductor materials
Electric potential

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Kai, T., Akiyama, M., Nakamura, Y., & Wakui, S. (2011). Effects of back electromotive force in an absolute displacement sensor and improvement using current-feedback-type driver. In 2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program (pp. 373-378). [6024919]

Effects of back electromotive force in an absolute displacement sensor and improvement using current-feedback-type driver. / Kai, Takashi; Akiyama, Masaya; Nakamura, Yukinori; Wakui, Shinji.

2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program. 2011. p. 373-378 6024919.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kai, T, Akiyama, M, Nakamura, Y & Wakui, S 2011, Effects of back electromotive force in an absolute displacement sensor and improvement using current-feedback-type driver. in 2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program., 6024919, pp. 373-378, 2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011, Zhengzhou, China, 8/11/11.
Kai T, Akiyama M, Nakamura Y, Wakui S. Effects of back electromotive force in an absolute displacement sensor and improvement using current-feedback-type driver. In 2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program. 2011. p. 373-378. 6024919
Kai, Takashi ; Akiyama, Masaya ; Nakamura, Yukinori ; Wakui, Shinji. / Effects of back electromotive force in an absolute displacement sensor and improvement using current-feedback-type driver. 2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program. 2011. pp. 373-378
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