Effect of vacuum ultraviolet light illumination on the crystallization of sol-gel-derived titanium dioxide precursor films

Akira Nakajima, Nobuaki Hayashi, Yayoi Taniguchi, Yoshikazu Kameshima, Kiyoshi Okada

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)

Abstract

Crystallization behavior of sol-gel-based TiO2 precursor films by vacuum ultraviolet (VUV) light illumination was investigated. VUV light illumination induces densification of films. This reaction accompanies the removal of organic compounds and OH groups with increasing apparent coordination number of titanium in the film from five to six. This structure change enhances film crystallization; polycrystalline anatase films were obtained by post annealing at 300 °C. Crystallization behavior suggested that proper balance of densification and removal of organic compounds are important tasks for further lowering crystallization temperature.

Original languageEnglish
Pages (from-to)112-116
Number of pages5
JournalSurface and Coatings Technology
Volume192
Issue number1
DOIs
Publication statusPublished - Mar 1 2005
Externally publishedYes

Keywords

  • Crystallization
  • Photocatalyst
  • Sol gel
  • Titanium oxide
  • Vacuum ultraviolet

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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