Effect of surrounding gas condition on surface integrity in micro-drilling of SiC by ns pulsed laser

Yasuhiro Okamoto, Kiichi Asako, Norio Nishi, Tomokazu Sakagawa, Akira Okada

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

The influence of the surrounding gas conditions on the surface integrity in the micro-drilling of silicon carbide was experimentally investigated using ns pulsed laser of 266 nm wavelength. Moreover, micro-machining characteristics were observed using high-speed shutter and video cameras in the micro-drilling of silicon carbide. The size and intensity of the laser-induced plasma were larger, and the plasma affected area was larger and deeper in argon than that in air. Although the intensity of the plasma was lower in helium than that in other gases, the surface around the drilled hole was roughened by the spread of the plasma in the vicinity of the drilled hole. Debris was removed along the flow field generated by laser shot in the opposite direction to the laser irradiation. The gas flow behavior and the spectrum and intensity of the laser-induced plasma were influenced by the surrounding gas type and pressure. The appearance of plasma generation affected the surface integrity at the circumference of the drilled hole, and the surface integrity was improved by reducing the pressure.

Original languageEnglish
JournalApplied Physics B: Lasers and Optics
DOIs
Publication statusAccepted/In press - Mar 5 2015

Fingerprint

drilling
integrity
pulsed lasers
gases
silicon carbides
lasers
plasma generators
circumferences
shutters
debris
machining
shot
gas flow
flow distribution
helium
cameras
argon
high speed
irradiation
air

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Effect of surrounding gas condition on surface integrity in micro-drilling of SiC by ns pulsed laser. / Okamoto, Yasuhiro; Asako, Kiichi; Nishi, Norio; Sakagawa, Tomokazu; Okada, Akira.

In: Applied Physics B: Lasers and Optics, 05.03.2015.

Research output: Contribution to journalArticle

@article{fd987015a84d43f4a29901f7a91996ce,
title = "Effect of surrounding gas condition on surface integrity in micro-drilling of SiC by ns pulsed laser",
abstract = "The influence of the surrounding gas conditions on the surface integrity in the micro-drilling of silicon carbide was experimentally investigated using ns pulsed laser of 266 nm wavelength. Moreover, micro-machining characteristics were observed using high-speed shutter and video cameras in the micro-drilling of silicon carbide. The size and intensity of the laser-induced plasma were larger, and the plasma affected area was larger and deeper in argon than that in air. Although the intensity of the plasma was lower in helium than that in other gases, the surface around the drilled hole was roughened by the spread of the plasma in the vicinity of the drilled hole. Debris was removed along the flow field generated by laser shot in the opposite direction to the laser irradiation. The gas flow behavior and the spectrum and intensity of the laser-induced plasma were influenced by the surrounding gas type and pressure. The appearance of plasma generation affected the surface integrity at the circumference of the drilled hole, and the surface integrity was improved by reducing the pressure.",
author = "Yasuhiro Okamoto and Kiichi Asako and Norio Nishi and Tomokazu Sakagawa and Akira Okada",
year = "2015",
month = "3",
day = "5",
doi = "10.1007/s00340-015-6060-x",
language = "English",
journal = "Applied Physics B: Lasers and Optics",
issn = "0946-2171",
publisher = "Springer Verlag",

}

TY - JOUR

T1 - Effect of surrounding gas condition on surface integrity in micro-drilling of SiC by ns pulsed laser

AU - Okamoto, Yasuhiro

AU - Asako, Kiichi

AU - Nishi, Norio

AU - Sakagawa, Tomokazu

AU - Okada, Akira

PY - 2015/3/5

Y1 - 2015/3/5

N2 - The influence of the surrounding gas conditions on the surface integrity in the micro-drilling of silicon carbide was experimentally investigated using ns pulsed laser of 266 nm wavelength. Moreover, micro-machining characteristics were observed using high-speed shutter and video cameras in the micro-drilling of silicon carbide. The size and intensity of the laser-induced plasma were larger, and the plasma affected area was larger and deeper in argon than that in air. Although the intensity of the plasma was lower in helium than that in other gases, the surface around the drilled hole was roughened by the spread of the plasma in the vicinity of the drilled hole. Debris was removed along the flow field generated by laser shot in the opposite direction to the laser irradiation. The gas flow behavior and the spectrum and intensity of the laser-induced plasma were influenced by the surrounding gas type and pressure. The appearance of plasma generation affected the surface integrity at the circumference of the drilled hole, and the surface integrity was improved by reducing the pressure.

AB - The influence of the surrounding gas conditions on the surface integrity in the micro-drilling of silicon carbide was experimentally investigated using ns pulsed laser of 266 nm wavelength. Moreover, micro-machining characteristics were observed using high-speed shutter and video cameras in the micro-drilling of silicon carbide. The size and intensity of the laser-induced plasma were larger, and the plasma affected area was larger and deeper in argon than that in air. Although the intensity of the plasma was lower in helium than that in other gases, the surface around the drilled hole was roughened by the spread of the plasma in the vicinity of the drilled hole. Debris was removed along the flow field generated by laser shot in the opposite direction to the laser irradiation. The gas flow behavior and the spectrum and intensity of the laser-induced plasma were influenced by the surrounding gas type and pressure. The appearance of plasma generation affected the surface integrity at the circumference of the drilled hole, and the surface integrity was improved by reducing the pressure.

UR - http://www.scopus.com/inward/record.url?scp=84924154209&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84924154209&partnerID=8YFLogxK

U2 - 10.1007/s00340-015-6060-x

DO - 10.1007/s00340-015-6060-x

M3 - Article

AN - SCOPUS:84924154209

JO - Applied Physics B: Lasers and Optics

JF - Applied Physics B: Lasers and Optics

SN - 0946-2171

ER -