Effect of SR irradiation on in2O3 film

K. Hanamoto, A. Hirai, M. Sasaki, Y. Kimura, K. Miyatani, C. Kaito, Y. Nakayama

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The effect of SR irradiation on the crystal growth of indium oxide films prepared by electron-beam evaporation have been studied by X-ray diffraction and high-resolution electron microscopy. An as-deposited film showed In2O3 crystallites with a size of 2-10 nm. The crystallites were destroyed by SR irradiation under oxygen flow. SR irradiation without oxygen flow showed the growth of In2O3 crystallites up to 20 nm in size with accompanying deoxidation and indium-particle growth. The as-deposited film was composed of variously oriented particles. Periodic oxygen decomposition of the film preferentially took place on the (001)-oriented particle.

Original languageEnglish
Pages (from-to)1213-1216
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume467-468
Issue numberPART II
DOIs
Publication statusPublished - Dec 1 2001
Externally publishedYes

Keywords

  • Crystallization
  • High-resolution electron microscopy
  • InO
  • Irradiation
  • Thin film

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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