Effect of radio frequency power on the properties of hydrogenated amorphous carbon films grown by radio frequency plasma-enhanced chemical vapor deposition

Engineering & Materials Science

• Amorphous films 100%
• Carbon films 96%
• Amorphous carbon 94%
• Plasma enhanced chemical vapor deposition 87%
• Photoluminescence 39%
• Optical band gaps 36%
• Paramagnetic resonance 33%
• Hydrogen 14%
• Optical emission spectroscopy 10%
• Infrared absorption 9%
• Defect density 8%
• Amorphous silicon 8%
• Raman spectroscopy 8%
• Spectroscopy 6%
• Plasmas 5%
• Hydrocarbons 5%
• Materials properties 5%

Physics & Astronomy

• radio frequencies 52%
• vapor deposition 47%
• carbon 41%
• electron paramagnetic resonance 22%
• photoluminescence 17%
• low frequencies 8%
• shift 7%
• optical emission spectroscopy 7%
• silicon films 6%
• infrared absorption 6%
• hydrocarbons 5%
• amorphous silicon 5%
• absorptivity 5%
• Raman spectroscopy 5%
• hydrogen 3%
• defects 3%
• spectroscopy 3%