Effect of radio frequency power on the properties of hydrogenated amorphous carbon films grown by radio frequency plasma-enhanced chemical vapor deposition

Yasuhiko Hayashi, Kouji Hagimoto, Hiroshi Ebisu, Murali Krishna Kalaga, Tetsuo Soga, Masayoshi Umeno, Takashi Jimbo

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28 Citations (Scopus)

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Engineering & Materials Science

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