Effect of laser wavelength on machining characteristics of aluminum nitride in micro-boring

Norio Kataoka, Yasuhiro Okamoto, Yoshiyuki Uno, Itaru Tanino

Research output: Contribution to conferencePaperpeer-review

1 Citation (Scopus)

Abstract

Effect of wavelength on machining characteristics of aluminum nitride in micro-drilling using Q-switched YAG harmonics was experimentally investigated. The depth of drilled hole increases with the decrease of wavelength, since photon energy and absorptivity becomes higher with decreasing the wavelength of laser beam. Besides, the energy loss by the plasma in laser processing decreases with decreasing the wavelength. Therefore, shorter wavelength is more effective in order to drill the micro-hole with high aspect ratio, when micro hole of high aspect ratio is drilled. Moreover, it is made it clear that the drilled depth under vacuum condition is deeper than that under the atmosphere pressure condition, since the removal of debris is carried out more efficiently compared the atmosphere pressure and assist gas supplying condition.

Original languageEnglish
DOIs
Publication statusPublished - 2006
EventICALEO 2006 - 25th International Congress on Applications of Laser and Electro-Optics - Scottsdale, AZ, United States
Duration: Oct 30 2006Nov 2 2006

Other

OtherICALEO 2006 - 25th International Congress on Applications of Laser and Electro-Optics
CountryUnited States
CityScottsdale, AZ
Period10/30/0611/2/06

ASJC Scopus subject areas

  • Geochemistry and Petrology
  • Electrical and Electronic Engineering

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