TY - JOUR
T1 - Effect of hydrogen on chemical vapor deposition growth of graphene on Au substrates
AU - Terasawa, Tomo O.
AU - Taira, Takanobu
AU - Yasuda, Satoshi
AU - Obata, Seiji
AU - Saiki, Koichiro
AU - Asaoka, Hidehito
N1 - Funding Information:
This work was supported by JSPS KAKENHI Grant Numbers JP25107002, JP15K13346, 18H01834, 17H05348, and JP18H05955.
Publisher Copyright:
© 2019 The Japan Society of Applied Physics.
PY - 2019
Y1 - 2019
N2 - Chemical vapor deposition (CVD) on substrates with low C solubility such as Cu and Au is promising to grow monolayer graphene selectively in a large scale. Hydrogen is often added to control the domain size of graphene on Cu, while Au does not require H2 since Ar is inert against oxidation. The effect of H2 should be revealed to improve the quality of graphene on Au. Here we report the effect of H2 on the CVD growth of graphene on Au substrates using in situ radiation-mode optical microscopy. The in situ observation and ex situ Raman spectroscopy revealed that whether H2 was supplied or not strongly affected the growth rate, thermal radiation contrast, and compressive strain of graphene on Au. We attributed these features to the surface reconstruction of Au(001) depending on H2 supply. Our results are essential to achieve the graphene growth with high quality on Au for future applications.
AB - Chemical vapor deposition (CVD) on substrates with low C solubility such as Cu and Au is promising to grow monolayer graphene selectively in a large scale. Hydrogen is often added to control the domain size of graphene on Cu, while Au does not require H2 since Ar is inert against oxidation. The effect of H2 should be revealed to improve the quality of graphene on Au. Here we report the effect of H2 on the CVD growth of graphene on Au substrates using in situ radiation-mode optical microscopy. The in situ observation and ex situ Raman spectroscopy revealed that whether H2 was supplied or not strongly affected the growth rate, thermal radiation contrast, and compressive strain of graphene on Au. We attributed these features to the surface reconstruction of Au(001) depending on H2 supply. Our results are essential to achieve the graphene growth with high quality on Au for future applications.
UR - http://www.scopus.com/inward/record.url?scp=85072828254&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85072828254&partnerID=8YFLogxK
U2 - 10.7567/1347-4065/ab19ae
DO - 10.7567/1347-4065/ab19ae
M3 - Article
AN - SCOPUS:85072828254
VL - 58
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - SI
M1 - SIIB17
ER -