Effect of chelating agents on high resolution electron beam nanolithography of spin-coatable A12O3 gel films

Mohammad S.M. Saifullah, Hideo Namatsu, Toni Yamaguchi, Kenji Yamazaki, Kenji Kurihara

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy