DLTS study of Pd-H complexes in Si

Sunao Abe, Ryuichi Goura, Koichi Shimoe, Yoichi Kamiura, Yoshifumi Yamashita, Takeshi Ishiyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have observed five electron traps with energy levels at 0.16, 0.30, 0.40, 0.53 and 0.67eV below the conduction band in Pd and H doped Si by DLTS technique. Successive annealing at 373K and 473 K for 30 min respectively caused two levels at Ec-0.16 eV and Ec-0.67 eV to disappear and simultaneously a new level to emerge at Ec-0.19 eV. From such annealing behavior and the comparison of the energy levels observed in the present study with those in the literature, we assign them to various Pd and H related defects as follows, Pd-H2: Ec-0.16 eV and Ec-0.67 eV, Pd acceptor:Ec-0.19 eV, Pd-H3: Ec-0.30 eV, Pd-H1: Ec-0.40 eV.

Original languageEnglish
Title of host publicationMaterials Science Forum
Pages213-216
Number of pages4
Volume725
DOIs
Publication statusPublished - 2012
Event14th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors, DRIP-14 - Miyazaki, Japan
Duration: Sep 25 2011Sep 29 2011

Publication series

NameMaterials Science Forum
Volume725
ISSN (Print)02555476

Other

Other14th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors, DRIP-14
CountryJapan
CityMiyazaki
Period9/25/119/29/11

Fingerprint

Deep level transient spectroscopy
Electron energy levels
energy levels
Annealing
Electron traps
annealing
Conduction bands
conduction bands
traps
Defects
defects
electrons

Keywords

  • Annealing
  • DLTS
  • Energy level
  • Hydrogen
  • Palladium
  • Si

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Abe, S., Goura, R., Shimoe, K., Kamiura, Y., Yamashita, Y., & Ishiyama, T. (2012). DLTS study of Pd-H complexes in Si. In Materials Science Forum (Vol. 725, pp. 213-216). (Materials Science Forum; Vol. 725). https://doi.org/10.4028/www.scientific.net/MSF.725.213

DLTS study of Pd-H complexes in Si. / Abe, Sunao; Goura, Ryuichi; Shimoe, Koichi; Kamiura, Yoichi; Yamashita, Yoshifumi; Ishiyama, Takeshi.

Materials Science Forum. Vol. 725 2012. p. 213-216 (Materials Science Forum; Vol. 725).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abe, S, Goura, R, Shimoe, K, Kamiura, Y, Yamashita, Y & Ishiyama, T 2012, DLTS study of Pd-H complexes in Si. in Materials Science Forum. vol. 725, Materials Science Forum, vol. 725, pp. 213-216, 14th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors, DRIP-14, Miyazaki, Japan, 9/25/11. https://doi.org/10.4028/www.scientific.net/MSF.725.213
Abe S, Goura R, Shimoe K, Kamiura Y, Yamashita Y, Ishiyama T. DLTS study of Pd-H complexes in Si. In Materials Science Forum. Vol. 725. 2012. p. 213-216. (Materials Science Forum). https://doi.org/10.4028/www.scientific.net/MSF.725.213
Abe, Sunao ; Goura, Ryuichi ; Shimoe, Koichi ; Kamiura, Yoichi ; Yamashita, Yoshifumi ; Ishiyama, Takeshi. / DLTS study of Pd-H complexes in Si. Materials Science Forum. Vol. 725 2012. pp. 213-216 (Materials Science Forum).
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