Dislocation filters utilizing anisotropic dislocation glide motion in modulus-modulated multilayer structures

K. Maeda, Y. Yamashita, S. Fukatsu, K. Suzuki, Y. Shiraki

Research output: Contribution to journalArticle

Abstract

Anisotropic dislocation glide expected in a multilayer structure modulated with shear modulus was investigated in Si-Ge/Si systems with an intention to apply this concept to dislocation filters that are used to reduce misfit dislocations in hetero-epitaxial films. The applicability of this approach to metallic systems is discussed.

Original languageEnglish
Pages (from-to)210-213
Number of pages4
JournalJournal of Magnetism and Magnetic Materials
Volume126
Issue number1-3
DOIs
Publication statusPublished - Sep 1993
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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