Development of three-degree-of-freedom zero-compliance mechanism for micro force measurement with a cantilever

Takeshi Mizuno, Yoichiro Hayashi, Masaya Takasaki, Yuji Ishino, Daisuke Yamaguchi

Research output: Contribution to journalConference articlepeer-review

Abstract

A multi-degree-of-freedom zero-compliance mechanism is developed for measuring micro force with a cantilever. The force acting on a tip of the cantilever is usually estimated from the displacement of the tip caused by the force. However, the position and attitude of the tip vary after force acts on the tip from the original ones. To keep them invariant, a three-degree-of-freedom zero compliance mechanism is designed, fabricated and installed into a force measurement system. In the developed measurement system, the force is estimated from the displacement/attitude of a detection point of the zero-compliance mechanism. It is confirmed analytically and experimentally that both vertical displacement and attitude of the detection point are proportional to the force applied to the tip.

Original languageEnglish
Pages (from-to)8339-8344
Number of pages6
JournalIFAC-PapersOnLine
Volume53
Issue number2
DOIs
Publication statusPublished - 2020
Event21st IFAC World Congress 2020 - Berlin, Germany
Duration: Jul 12 2020Jul 17 2020

Keywords

  • Attitude control
  • Cascade
  • Force
  • Kinematics
  • Measuring transducers
  • Mechanisms
  • Modelling
  • Position control

ASJC Scopus subject areas

  • Control and Systems Engineering

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