Development of microfabricated TiO2 channel waveguides

Masayuki Furuhashi; Masazumi Fujiwara; Takahito Ohshiro; Makusu Tsutsui; Kazuki Matsubara; Masateru Taniguchi; Shigeki Takeuchi; Tomoji Kawai

doi:10.1063/1.3615716

Development of microfabricated TiO₂ channel waveguides

Masayuki Furuhashi, Masazumi Fujiwara, Takahito Ohshiro, Makusu Tsutsui, Kazuki Matsubara, Masateru Taniguchi, Shigeki Takeuchi, Tomoji Kawai

Research output: Contribution to journal › Article › peer-review

47 Citations (Scopus)

Abstract

An optical channel waveguide is a key solution to overcome signal propagation delay. For the benefits of miniaturization, development of microfabrication process for waveguides is demanded. TiO₂ is one of the suitable candidates for the microfabricated waveguide because of the high refractive index and the transparency. In the present study, conventional microfabrication processes manufactured TiO₂ channel waveguides with 1-20 m width on oxidized Si substrates and the propagation loss was measured. The prepared channels successfully guided light of 632.8 nm along linear and Y-branched patterns. The propagation loss for the linear waveguide was 9.7 dBcm.

Original language	English
Article number	032102
Journal	AIP Advances
Volume	1
Issue number	3
DOIs	https://doi.org/10.1063/1.3615716
Publication status	Published - Sept 2011
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1063/1.3615716

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@article{f6cca469adfe4c3090368024d305f91c,

title = "Development of microfabricated TiO2 channel waveguides",

abstract = "An optical channel waveguide is a key solution to overcome signal propagation delay. For the benefits of miniaturization, development of microfabrication process for waveguides is demanded. TiO2 is one of the suitable candidates for the microfabricated waveguide because of the high refractive index and the transparency. In the present study, conventional microfabrication processes manufactured TiO2 channel waveguides with 1-20 m width on oxidized Si substrates and the propagation loss was measured. The prepared channels successfully guided light of 632.8 nm along linear and Y-branched patterns. The propagation loss for the linear waveguide was 9.7 dBcm.",

author = "Masayuki Furuhashi and Masazumi Fujiwara and Takahito Ohshiro and Makusu Tsutsui and Kazuki Matsubara and Masateru Taniguchi and Shigeki Takeuchi and Tomoji Kawai",

note = "Funding Information: The authors would like to thank Mr. Masato Tanida for his technical assistance. This research was supported by the Funding Program for World-Leading Innovative Research and Development on Science and Technology “Innovative NanoBiodevice based on Single Molecule Analysis” from the Japan Society for the Promotion of Science. Takeuchi and Fujiwara acknowledge the supports from the Management Expenses Grants for National Universities Corporations from MEXT and a Grant-in-Aid from the Japan Society for the Promotion of Science.",

year = "2011",

month = sep,

doi = "10.1063/1.3615716",

language = "English",

volume = "1",

journal = "AIP Advances",

issn = "2158-3226",

publisher = "American Institute of Physics Publising LLC",

number = "3",

}

TY - JOUR

T1 - Development of microfabricated TiO2 channel waveguides

AU - Furuhashi, Masayuki

AU - Fujiwara, Masazumi

AU - Ohshiro, Takahito

AU - Tsutsui, Makusu

AU - Matsubara, Kazuki

AU - Taniguchi, Masateru

AU - Takeuchi, Shigeki

AU - Kawai, Tomoji

N1 - Funding Information: The authors would like to thank Mr. Masato Tanida for his technical assistance. This research was supported by the Funding Program for World-Leading Innovative Research and Development on Science and Technology “Innovative NanoBiodevice based on Single Molecule Analysis” from the Japan Society for the Promotion of Science. Takeuchi and Fujiwara acknowledge the supports from the Management Expenses Grants for National Universities Corporations from MEXT and a Grant-in-Aid from the Japan Society for the Promotion of Science.

PY - 2011/9

Y1 - 2011/9

N2 - An optical channel waveguide is a key solution to overcome signal propagation delay. For the benefits of miniaturization, development of microfabrication process for waveguides is demanded. TiO2 is one of the suitable candidates for the microfabricated waveguide because of the high refractive index and the transparency. In the present study, conventional microfabrication processes manufactured TiO2 channel waveguides with 1-20 m width on oxidized Si substrates and the propagation loss was measured. The prepared channels successfully guided light of 632.8 nm along linear and Y-branched patterns. The propagation loss for the linear waveguide was 9.7 dBcm.

AB - An optical channel waveguide is a key solution to overcome signal propagation delay. For the benefits of miniaturization, development of microfabrication process for waveguides is demanded. TiO2 is one of the suitable candidates for the microfabricated waveguide because of the high refractive index and the transparency. In the present study, conventional microfabrication processes manufactured TiO2 channel waveguides with 1-20 m width on oxidized Si substrates and the propagation loss was measured. The prepared channels successfully guided light of 632.8 nm along linear and Y-branched patterns. The propagation loss for the linear waveguide was 9.7 dBcm.

UR - http://www.scopus.com/inward/record.url?scp=80053499794&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80053499794&partnerID=8YFLogxK

U2 - 10.1063/1.3615716

DO - 10.1063/1.3615716

M3 - Article

AN - SCOPUS:80053499794

SN - 2158-3226

VL - 1

JO - AIP Advances

JF - AIP Advances

IS - 3

M1 - 032102

ER -

Development of microfabricated TiO₂ channel waveguides

Abstract

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