Development of microfabricated TiO2 channel waveguides

Masayuki Furuhashi, Masazumi Fujiwara, Takahito Ohshiro, Makusu Tsutsui, Kazuki Matsubara, Masateru Taniguchi, Shigeki Takeuchi, Tomoji Kawai

Research output: Contribution to journalArticlepeer-review

47 Citations (Scopus)


An optical channel waveguide is a key solution to overcome signal propagation delay. For the benefits of miniaturization, development of microfabrication process for waveguides is demanded. TiO2 is one of the suitable candidates for the microfabricated waveguide because of the high refractive index and the transparency. In the present study, conventional microfabrication processes manufactured TiO2 channel waveguides with 1-20 m width on oxidized Si substrates and the propagation loss was measured. The prepared channels successfully guided light of 632.8 nm along linear and Y-branched patterns. The propagation loss for the linear waveguide was 9.7 dBcm.

Original languageEnglish
Article number032102
JournalAIP Advances
Issue number3
Publication statusPublished - Sept 2011
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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