TY - JOUR
T1 - Development of high-throughput fabrication process of HTS SQUID for 51-ch MCG system
AU - Tsukamoto, A.
AU - Saitoh, K.
AU - Yokosawa, K.
AU - Suzuki, D.
AU - Seki, Y.
AU - Kandori, A.
AU - Tsukada, Keiji
PY - 2005
Y1 - 2005
N2 - A high-throughput high-Tc SQUID fabrication process that can provide the appropriate number of SQUIDs for a 51-channel magnetocardiograph (MCG) has been developed. A new deposition system-based on a pulsed-laser-deposition technique to increase the process throughput in fabricating superconducting YBa2Cu3Oy thin films-was developed. In this system, nine superconducting thin films are successively deposited on bicrystal substrates in one deposition sequence. A mask aligner, which was customized for the bicrystal substrate, was also developed. This system enables mask alignment for the bicrystal grain boundary without the need for preprocessing to visualize it. In addition, the magnetometer pattern was designed to improve the yield for magnetometer fabrication. In this directly coupled magnetometer, four SQUIDs were connected with the same pickup coil. Accordingly, the yield of magnetometer could be enhanced by selecting the best SQUID among the four.
AB - A high-throughput high-Tc SQUID fabrication process that can provide the appropriate number of SQUIDs for a 51-channel magnetocardiograph (MCG) has been developed. A new deposition system-based on a pulsed-laser-deposition technique to increase the process throughput in fabricating superconducting YBa2Cu3Oy thin films-was developed. In this system, nine superconducting thin films are successively deposited on bicrystal substrates in one deposition sequence. A mask aligner, which was customized for the bicrystal substrate, was also developed. This system enables mask alignment for the bicrystal grain boundary without the need for preprocessing to visualize it. In addition, the magnetometer pattern was designed to improve the yield for magnetometer fabrication. In this directly coupled magnetometer, four SQUIDs were connected with the same pickup coil. Accordingly, the yield of magnetometer could be enhanced by selecting the best SQUID among the four.
KW - Magnetocardiograph
KW - SQUID
KW - Throughput
KW - YBCO
KW - Yield
UR - http://www.scopus.com/inward/record.url?scp=25444431724&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=25444431724&partnerID=8YFLogxK
U2 - 10.1016/j.physc.2005.02.122
DO - 10.1016/j.physc.2005.02.122
M3 - Article
AN - SCOPUS:25444431724
VL - 426-431
SP - 1580
EP - 1584
JO - Physica C: Superconductivity and its Applications
JF - Physica C: Superconductivity and its Applications
SN - 0921-4534
IS - II
ER -