Development of high-throughput fabrication process of HTS SQUID for 51-ch MCG system

A. Tsukamoto; K. Saitoh; K. Yokosawa; D. Suzuki; Y. Seki; A. Kandori; K. Tsukada

doi:10.1016/j.physc.2005.02.122

Development of high-throughput fabrication process of HTS SQUID for 51-ch MCG system

A. Tsukamoto, K. Saitoh, K. Yokosawa, D. Suzuki, Y. Seki, A. Kandori, K. Tsukada

Research output: Contribution to journal › Conference article › peer-review

4 Citations (Scopus)

Abstract

A high-throughput high-T_c SQUID fabrication process that can provide the appropriate number of SQUIDs for a 51-channel magnetocardiograph (MCG) has been developed. A new deposition system-based on a pulsed-laser-deposition technique to increase the process throughput in fabricating superconducting YBa₂Cu₃O_y thin films-was developed. In this system, nine superconducting thin films are successively deposited on bicrystal substrates in one deposition sequence. A mask aligner, which was customized for the bicrystal substrate, was also developed. This system enables mask alignment for the bicrystal grain boundary without the need for preprocessing to visualize it. In addition, the magnetometer pattern was designed to improve the yield for magnetometer fabrication. In this directly coupled magnetometer, four SQUIDs were connected with the same pickup coil. Accordingly, the yield of magnetometer could be enhanced by selecting the best SQUID among the four.

Original language	English
Pages (from-to)	1580-1584
Number of pages	5
Journal	Physica C: Superconductivity and its applications
Volume	426-431
Issue number	II
DOIs	https://doi.org/10.1016/j.physc.2005.02.122
Publication status	Published - Oct 6 2005
Event	Proceedings of the 17th Internatioanl Symposium on Superconductivity (ISS 2004) Advances in Superconductivity - Duration: Nov 23 2004 → Nov 25 2004

Keywords

Magnetocardiograph
SQUID
Throughput
YBCO
Yield

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Energy Engineering and Power Technology
Electrical and Electronic Engineering

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title = "Development of high-throughput fabrication process of HTS SQUID for 51-ch MCG system",

abstract = "A high-throughput high-Tc SQUID fabrication process that can provide the appropriate number of SQUIDs for a 51-channel magnetocardiograph (MCG) has been developed. A new deposition system-based on a pulsed-laser-deposition technique to increase the process throughput in fabricating superconducting YBa2Cu3Oy thin films-was developed. In this system, nine superconducting thin films are successively deposited on bicrystal substrates in one deposition sequence. A mask aligner, which was customized for the bicrystal substrate, was also developed. This system enables mask alignment for the bicrystal grain boundary without the need for preprocessing to visualize it. In addition, the magnetometer pattern was designed to improve the yield for magnetometer fabrication. In this directly coupled magnetometer, four SQUIDs were connected with the same pickup coil. Accordingly, the yield of magnetometer could be enhanced by selecting the best SQUID among the four.",

keywords = "Magnetocardiograph, SQUID, Throughput, YBCO, Yield",

author = "A. Tsukamoto and K. Saitoh and K. Yokosawa and D. Suzuki and Y. Seki and A. Kandori and K. Tsukada",

year = "2005",

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doi = "10.1016/j.physc.2005.02.122",

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note = "Proceedings of the 17th Internatioanl Symposium on Superconductivity (ISS 2004) Advances in Superconductivity ; Conference date: 23-11-2004 Through 25-11-2004",

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T1 - Development of high-throughput fabrication process of HTS SQUID for 51-ch MCG system

AU - Tsukamoto, A.

AU - Saitoh, K.

AU - Yokosawa, K.

AU - Suzuki, D.

AU - Seki, Y.

AU - Kandori, A.

AU - Tsukada, K.

PY - 2005/10/6

Y1 - 2005/10/6

N2 - A high-throughput high-Tc SQUID fabrication process that can provide the appropriate number of SQUIDs for a 51-channel magnetocardiograph (MCG) has been developed. A new deposition system-based on a pulsed-laser-deposition technique to increase the process throughput in fabricating superconducting YBa2Cu3Oy thin films-was developed. In this system, nine superconducting thin films are successively deposited on bicrystal substrates in one deposition sequence. A mask aligner, which was customized for the bicrystal substrate, was also developed. This system enables mask alignment for the bicrystal grain boundary without the need for preprocessing to visualize it. In addition, the magnetometer pattern was designed to improve the yield for magnetometer fabrication. In this directly coupled magnetometer, four SQUIDs were connected with the same pickup coil. Accordingly, the yield of magnetometer could be enhanced by selecting the best SQUID among the four.

AB - A high-throughput high-Tc SQUID fabrication process that can provide the appropriate number of SQUIDs for a 51-channel magnetocardiograph (MCG) has been developed. A new deposition system-based on a pulsed-laser-deposition technique to increase the process throughput in fabricating superconducting YBa2Cu3Oy thin films-was developed. In this system, nine superconducting thin films are successively deposited on bicrystal substrates in one deposition sequence. A mask aligner, which was customized for the bicrystal substrate, was also developed. This system enables mask alignment for the bicrystal grain boundary without the need for preprocessing to visualize it. In addition, the magnetometer pattern was designed to improve the yield for magnetometer fabrication. In this directly coupled magnetometer, four SQUIDs were connected with the same pickup coil. Accordingly, the yield of magnetometer could be enhanced by selecting the best SQUID among the four.

KW - Magnetocardiograph

KW - SQUID

KW - Throughput

KW - YBCO

KW - Yield

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