Development of EUV light source by laser-produced plasma

Y. Izawa, N. Miyanaga, H. Nishimura, S. Fujioka, T. Aota, Y. Tao, S. Uchida, Y. Shimada, K. Hashimoto, M. Yamaura, K. Nishihara, M. Murakami, A. Sunahara, H. Furukawa, A. Sasaki, W. Nishikawa, H. Tanuma, T. Norimatsu, K. Nagai, Q. GuM. Nakatsuka, H. Fujita, K. Tsubakimoto, H. Yoshida, K. Mima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Fingerprint Dive into the research topics of 'Development of EUV light source by laser-produced plasma'. Together they form a unique fingerprint.

Physics & Astronomy