Abstract
A new compact pneumatic cylinder with a micro position sensor, named intelligent pneumatic cylinder was developed. It consists of a piston rod with stripe codes and a micro optical MEMS encoder. The stripe codes were fabricated through a selective oxidization process by irradiating with a YAG laser. The cylinder realizes a compact pneumatic position servo system. The servo experimental results were very promising. The piston rod position is easily controlled at any desired position between both ends of the rod stroke. This paper reports also an adaptive servo algorithm which was newly developed for stepping positioning of the intelligent pneumatic cylinder, realizing about 0.3 to 1 mm positioning accuracy without overshooting.
Original language | English |
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Pages | 479-484 |
Number of pages | 6 |
Publication status | Published - Nov 16 2005 |
Event | Proceedings of the 2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2005 - Monterey, CA, United States Duration: Jul 24 2005 → Jul 28 2005 |
Other
Other | Proceedings of the 2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2005 |
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Country/Territory | United States |
City | Monterey, CA |
Period | 7/24/05 → 7/28/05 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Software
- Computer Science Applications
- Electrical and Electronic Engineering