Abstract
In order to measure precisely the circumferential profiles of small cylindrical and spherical objects, we have developed an atomic force microscope that consists of a cantilevered probe, an optical lever system for detecting the probe deflection, and an air bearing sample stage. This rotating atomic force microscope (R-AFM) provided a roundness profile of φ 2mm bearing ball, and the profile was compared with that measured by a commercial roundness instrument. Since the R-AFM uses a sharper tip and a lower applied force than the instrument, the roundness profile obtained by the R-AFM showed higher resolution than that by the commercial instrument. Measurements of circumferential profiles of a φ30μm tungsten wire confirmed that the R-AFM has high accuracy for measuring circumferential profiles of small cylindrical objects. Possible applications of the R-AFM have been demonstrated through obtaining circumferential images of an optical fiber, a human hair, and a spine on an insect's leg.
Original language | English |
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Pages (from-to) | 886-893 |
Number of pages | 8 |
Journal | Toraibarojisuto/Journal of Japanese Society of Tribologists |
Volume | 49 |
Issue number | 11 |
Publication status | Published - Dec 1 2004 |
Keywords
- AFM
- Circumferential profiling
- Micromachine
- Roundness instrument
- SPM
ASJC Scopus subject areas
- Mechanics of Materials
- Mechanical Engineering
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry