Development of an atomic force microscope with capability of circumferential profiling

Hiroshi Kinoshita, Tomonari Sako, Masahito Tagawa, Nobuo Ohmae, Hiroshi Komiya

Research output: Contribution to journalArticlepeer-review

Abstract

In order to measure precisely the circumferential profiles of small cylindrical and spherical objects, we have developed an atomic force microscope that consists of a cantilevered probe, an optical lever system for detecting the probe deflection, and an air bearing sample stage. This rotating atomic force microscope (R-AFM) provided a roundness profile of φ 2mm bearing ball, and the profile was compared with that measured by a commercial roundness instrument. Since the R-AFM uses a sharper tip and a lower applied force than the instrument, the roundness profile obtained by the R-AFM showed higher resolution than that by the commercial instrument. Measurements of circumferential profiles of a φ30μm tungsten wire confirmed that the R-AFM has high accuracy for measuring circumferential profiles of small cylindrical objects. Possible applications of the R-AFM have been demonstrated through obtaining circumferential images of an optical fiber, a human hair, and a spine on an insect's leg.

Original languageEnglish
Pages (from-to)886-893
Number of pages8
JournalToraibarojisuto/Journal of Japanese Society of Tribologists
Volume49
Issue number11
Publication statusPublished - Dec 1 2004

Keywords

  • AFM
  • Circumferential profiling
  • Micromachine
  • Roundness instrument
  • SPM

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Fingerprint Dive into the research topics of 'Development of an atomic force microscope with capability of circumferential profiling'. Together they form a unique fingerprint.

Cite this