Abstract
This paper presents the simulator for air-spring type anti-vibration apparatuses, which are utilized for semiconductor exposure equipment. Rotational and translational motions of the apparatuses are simulated based on the dynamical model and the geometric alignment of sensors and actuators. The performance of the mode control implemented in the simulator is evaluated. Simulation results show advantages of this control method.
| Original language | English |
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| Title of host publication | 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012 |
| Pages | 591-596 |
| Number of pages | 6 |
| Publication status | Published - Nov 27 2012 |
| Externally published | Yes |
| Event | 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012 - Tokyo, Japan Duration: Sep 18 2012 → Sep 21 2012 |
Publication series
| Name | 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012 |
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Other
| Other | 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012 |
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| Country | Japan |
| City | Tokyo |
| Period | 9/18/12 → 9/21/12 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
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Cite this
Kaneko, Y., Nakamura, Y., Wakui, S., Kim, B. S., & Song, C. K. (2012). Development and evaluation of a simulator for pneumatic anti-vibration apparatuses with six degrees-of-freedom using mode control. In 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012 (pp. 591-596). [6329648] (2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012).