Abstract
This paper presents the simulator for air-spring type anti-vibration apparatuses, which are utilized for semiconductor exposure equipment. Rotational and translational motions of the apparatuses are simulated based on the dynamical model and the geometric alignment of sensors and actuators. The performance of the mode control implemented in the simulator is evaluated. Simulation results show advantages of this control method.
| Original language | English |
|---|---|
| Title of host publication | 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012 |
| Pages | 591-596 |
| Number of pages | 6 |
| Publication status | Published - 2012 |
| Externally published | Yes |
| Event | 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012 - Tokyo, Japan Duration: Sep 18 2012 → Sep 21 2012 |
Other
| Other | 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012 |
|---|---|
| Country | Japan |
| City | Tokyo |
| Period | 9/18/12 → 9/21/12 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
Cite this
Development and evaluation of a simulator for pneumatic anti-vibration apparatuses with six degrees-of-freedom using mode control. / Kaneko, Yuka; Nakamura, Yukinori; Wakui, Shinji; Kim, Byung Sub; Song, Chang Kyu.
2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012. 2012. p. 591-596 6329648.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Development and evaluation of a simulator for pneumatic anti-vibration apparatuses with six degrees-of-freedom using mode control
AU - Kaneko, Yuka
AU - Nakamura, Yukinori
AU - Wakui, Shinji
AU - Kim, Byung Sub
AU - Song, Chang Kyu
PY - 2012
Y1 - 2012
N2 - This paper presents the simulator for air-spring type anti-vibration apparatuses, which are utilized for semiconductor exposure equipment. Rotational and translational motions of the apparatuses are simulated based on the dynamical model and the geometric alignment of sensors and actuators. The performance of the mode control implemented in the simulator is evaluated. Simulation results show advantages of this control method.
AB - This paper presents the simulator for air-spring type anti-vibration apparatuses, which are utilized for semiconductor exposure equipment. Rotational and translational motions of the apparatuses are simulated based on the dynamical model and the geometric alignment of sensors and actuators. The performance of the mode control implemented in the simulator is evaluated. Simulation results show advantages of this control method.
UR - http://www.scopus.com/inward/record.url?scp=84869768129&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84869768129&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84869768129
SN - 9780955529382
SP - 591
EP - 596
BT - 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
ER -