Development and evaluation of a simulator for pneumatic anti-vibration apparatuses with six degrees-of-freedom using mode control

Yuka Kaneko, Yukinori Nakamura, Shinji Wakui, Byung Sub Kim, Chang Kyu Song

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper presents the simulator for air-spring type anti-vibration apparatuses, which are utilized for semiconductor exposure equipment. Rotational and translational motions of the apparatuses are simulated based on the dynamical model and the geometric alignment of sensors and actuators. The performance of the mode control implemented in the simulator is evaluated. Simulation results show advantages of this control method.

Original languageEnglish
Title of host publication2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
Pages591-596
Number of pages6
Publication statusPublished - 2012
Externally publishedYes
Event2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012 - Tokyo, Japan
Duration: Sep 18 2012Sep 21 2012

Other

Other2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
CountryJapan
CityTokyo
Period9/18/129/21/12

Fingerprint

Degrees of freedom (mechanics)
Pneumatics
Simulators
Actuators
Semiconductor materials
Sensors
Air

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Kaneko, Y., Nakamura, Y., Wakui, S., Kim, B. S., & Song, C. K. (2012). Development and evaluation of a simulator for pneumatic anti-vibration apparatuses with six degrees-of-freedom using mode control. In 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012 (pp. 591-596). [6329648]

Development and evaluation of a simulator for pneumatic anti-vibration apparatuses with six degrees-of-freedom using mode control. / Kaneko, Yuka; Nakamura, Yukinori; Wakui, Shinji; Kim, Byung Sub; Song, Chang Kyu.

2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012. 2012. p. 591-596 6329648.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kaneko, Y, Nakamura, Y, Wakui, S, Kim, BS & Song, CK 2012, Development and evaluation of a simulator for pneumatic anti-vibration apparatuses with six degrees-of-freedom using mode control. in 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012., 6329648, pp. 591-596, 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012, Tokyo, Japan, 9/18/12.
Kaneko Y, Nakamura Y, Wakui S, Kim BS, Song CK. Development and evaluation of a simulator for pneumatic anti-vibration apparatuses with six degrees-of-freedom using mode control. In 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012. 2012. p. 591-596. 6329648
Kaneko, Yuka ; Nakamura, Yukinori ; Wakui, Shinji ; Kim, Byung Sub ; Song, Chang Kyu. / Development and evaluation of a simulator for pneumatic anti-vibration apparatuses with six degrees-of-freedom using mode control. 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012. 2012. pp. 591-596
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