TY - GEN
T1 - Development and evaluation of a simulator for pneumatic anti-vibration apparatuses with six degrees-of-freedom using mode control
AU - Kaneko, Yuka
AU - Nakamura, Yukinori
AU - Wakui, Shinji
AU - Kim, Byung Sub
AU - Song, Chang Kyu
PY - 2012/11/27
Y1 - 2012/11/27
N2 - This paper presents the simulator for air-spring type anti-vibration apparatuses, which are utilized for semiconductor exposure equipment. Rotational and translational motions of the apparatuses are simulated based on the dynamical model and the geometric alignment of sensors and actuators. The performance of the mode control implemented in the simulator is evaluated. Simulation results show advantages of this control method.
AB - This paper presents the simulator for air-spring type anti-vibration apparatuses, which are utilized for semiconductor exposure equipment. Rotational and translational motions of the apparatuses are simulated based on the dynamical model and the geometric alignment of sensors and actuators. The performance of the mode control implemented in the simulator is evaluated. Simulation results show advantages of this control method.
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M3 - Conference contribution
AN - SCOPUS:84869768129
SN - 9780955529382
T3 - 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
SP - 591
EP - 596
BT - 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
T2 - 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
Y2 - 18 September 2012 through 21 September 2012
ER -