Detailed atomic modeling of Sn plasmas for the EUV source

A. Sasaki, A. Sunahara, K. Nishihawra, Takeshi Nishikawa, F. Koike, H. Tanuma

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

An atomic model of Sn plasmas is developed to calculate coefficients of radiative transfer, based on the calculated atomic data using the Hullac code. We find that the emission spectrum and conversion efficiency depend critically on the wavelength and spectral structure of the 4d-4f transition arrays. Satellite lines, which have a significant contribution to the emission, are determined after iterative calculations by changing the number of levels in the atomic model. We also correct transition wavelengths through comparison with experiments. Using the present emissivity and opacity, the radiation hydrodynamics simulation will be carried out toward the optimization of the EUV source.

Original languageEnglish
Article number042062
JournalJournal of Physics: Conference Series
Volume112
Issue numberPart 4
DOIs
Publication statusPublished - Jun 12 2008

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opacity
emissivity
wavelengths
radiative transfer
emission spectra
hydrodynamics
optimization
radiation
coefficients
simulation

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Detailed atomic modeling of Sn plasmas for the EUV source. / Sasaki, A.; Sunahara, A.; Nishihawra, K.; Nishikawa, Takeshi; Koike, F.; Tanuma, H.

In: Journal of Physics: Conference Series, Vol. 112, No. Part 4, 042062, 12.06.2008.

Research output: Contribution to journalArticle

Sasaki, A. ; Sunahara, A. ; Nishihawra, K. ; Nishikawa, Takeshi ; Koike, F. ; Tanuma, H. / Detailed atomic modeling of Sn plasmas for the EUV source. In: Journal of Physics: Conference Series. 2008 ; Vol. 112, No. Part 4.
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