Design and testing of rotors for a cylindrical micro-machined micro ultrasonic motor

T. Kanda, Y. Oomori, A. Makino, K. Suzumori, A. Kobayashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, a design and testing of rotors for a micro ultrasonic motor using micro-machined cylindrical bulk piezoelectric vibrator is introduced. This motor consists of the vibrator, a glass case and a rotor. The diameter of the piezoelectric vibrator was 0.8 mm and that of the motor case was 1.8 mm. Since the stator transducer is fixed at the end of the cylinder, it is easy to support the vibrator and the structure of the motor was not complicated. In addition, the vibrator and rotor were supported by glass case. This is important for micro ultrasonic motor because it is difficult to support the vibrator when the vibrator was miniaturized. We have fabricated and evaluated some types of rotors for the cylindrical shaped traveling type micro ultrasonic motor using this vibrator.

Original languageEnglish
Title of host publication2005 IEEE Ultrasonics Symposium
Pages301-304
Number of pages4
DOIs
Publication statusPublished - Dec 1 2005
Event2005 IEEE Ultrasonics Symposium - Rotterdam, Netherlands
Duration: Sep 18 2005Sep 21 2005

Publication series

NameProceedings - IEEE Ultrasonics Symposium
Volume1
ISSN (Print)1051-0117

Other

Other2005 IEEE Ultrasonics Symposium
CountryNetherlands
CityRotterdam
Period9/18/059/21/05

Keywords

  • Bulk piezoelectric material
  • Micro machining
  • Micromotor
  • Piezoelectric actuator
  • Ultrasonicmotor

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Fingerprint Dive into the research topics of 'Design and testing of rotors for a cylindrical micro-machined micro ultrasonic motor'. Together they form a unique fingerprint.

  • Cite this

    Kanda, T., Oomori, Y., Makino, A., Suzumori, K., & Kobayashi, A. (2005). Design and testing of rotors for a cylindrical micro-machined micro ultrasonic motor. In 2005 IEEE Ultrasonics Symposium (pp. 301-304). [1602855] (Proceedings - IEEE Ultrasonics Symposium; Vol. 1). https://doi.org/10.1109/ULTSYM.2005.1602855