Design and evaluation of low-profile micro ultrasonic motors using sector shaped piezoelectric vibrators

Takashi Ichihara, Takefumi Kanda, Koichi Suzumori

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

A low-profile micro ultrasonic motor has been designed and fabricated. This motor has two sector shaped vibrators. The vibrators generate elliptical motion by the 1st longitudinal mode and 2nd bending mode. They are supported by planar elastic structure that combined with preload mechanism. Three types of preload systems were designed and evaluated. The thickness of one type was 0.6mm. These vibrators have been oscillated around 340 kHz. The maximum rotation speed was 2.4x103rpm and the maximum starting torque was 98.8μNm when the applied voltage was 20Vp-p.

Original languageEnglish
Title of host publication2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS
Pages588-593
Number of pages6
DOIs
Publication statusPublished - Dec 1 2008
Event2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS - Nice, France
Duration: Sep 22 2008Sep 26 2008

Publication series

Name2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS

Other

Other2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS
CountryFrance
CityNice
Period9/22/089/26/08

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Vision and Pattern Recognition
  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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    Ichihara, T., Kanda, T., & Suzumori, K. (2008). Design and evaluation of low-profile micro ultrasonic motors using sector shaped piezoelectric vibrators. In 2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS (pp. 588-593). [4651178] (2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS). https://doi.org/10.1109/IROS.2008.4651178