TY - GEN
T1 - Design and evaluation of low-profile micro ultrasonic motors using sector shaped piezoelectric vibrators
AU - Ichihara, Takashi
AU - Kanda, Takefumi
AU - Suzumori, Koichi
PY - 2008/12/1
Y1 - 2008/12/1
N2 - A low-profile micro ultrasonic motor has been designed and fabricated. This motor has two sector shaped vibrators. The vibrators generate elliptical motion by the 1st longitudinal mode and 2nd bending mode. They are supported by planar elastic structure that combined with preload mechanism. Three types of preload systems were designed and evaluated. The thickness of one type was 0.6mm. These vibrators have been oscillated around 340 kHz. The maximum rotation speed was 2.4x103rpm and the maximum starting torque was 98.8μNm when the applied voltage was 20Vp-p.
AB - A low-profile micro ultrasonic motor has been designed and fabricated. This motor has two sector shaped vibrators. The vibrators generate elliptical motion by the 1st longitudinal mode and 2nd bending mode. They are supported by planar elastic structure that combined with preload mechanism. Three types of preload systems were designed and evaluated. The thickness of one type was 0.6mm. These vibrators have been oscillated around 340 kHz. The maximum rotation speed was 2.4x103rpm and the maximum starting torque was 98.8μNm when the applied voltage was 20Vp-p.
UR - http://www.scopus.com/inward/record.url?scp=69549124131&partnerID=8YFLogxK
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U2 - 10.1109/IROS.2008.4651178
DO - 10.1109/IROS.2008.4651178
M3 - Conference contribution
AN - SCOPUS:69549124131
SN - 9781424420582
T3 - 2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS
SP - 588
EP - 593
BT - 2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS
T2 - 2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS
Y2 - 22 September 2008 through 26 September 2008
ER -