Design and evaluation of low-profile micro ultrasonic motors driven by sector shaped piezoelectric vibrators

Takefumi Kanda, Takashi Ichihara, Koichi Suzumori

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)


In order to miniaturize micro mechatronics systems and portable devices, there are increasing needs for low-profile and high power micro actuators. The aim of this paper is to improve the transducer of low-profile micro ultrasonic motors. This motor has two sector-shaped vibrators and the pre-load mechanism. In this research, the pre-load mechanism was redesigned by the finite element method and the beam width of the pre-load mechanism was changed partly. The pre-load systems that used a new pre-load mechanism design were fabricated and evaluated.

Original languageEnglish
Title of host publicationProceedings - IEEE Ultrasonics Symposium
Publication statusPublished - 2009
Event2009 IEEE International Ultrasonics Symposium, IUS 2009 - Rome, Italy
Duration: Sep 20 2009Sep 23 2009


Other2009 IEEE International Ultrasonics Symposium, IUS 2009



  • Finite element method
  • Low-profile
  • Micro motor
  • Pre-load mechanism
  • Ultrasonic motor

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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