Deadlock avoidance policy for dual-Armed multi-cluster tools with multi-flow

Yushin Watanabe, Tatsushi Nishi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Cluster tools are widely used for semiconductor manufacturing. Scheduling of multi-cluster tools has been received much attention. A cluster tool consists of several processing modules, transfer module with single or dual-Armed handling robot and loadlock modules. The multi-cluster tool consists of two or three cluster tools which are connected with buffer module. In this paper, we present a deadlock-free scheduling for dual-Armed multi-cluster tools with multi-flow. We develop a deadlock avoidance policy for dual-Armed multi-cluster tools with dual path. A Petri net model is analyzed to derive a deadlock avoidance policy. The deadlock-freeness is confirmed by analyzing siphon of Petri net model. The deadlock-free scheduling method is proposed. The proposed method is applied to the scheduling problem of three-cluster tools with dual path. The computational results show that no deadlock occurs with the proposed deadlock avoidance policy.

Original languageEnglish
Title of host publicationIEEE International Conference on Industrial Engineering and Engineering Management
PublisherIEEE Computer Society
Pages611-615
Number of pages5
ISBN (Electronic)9781479909865
DOIs
Publication statusPublished - Nov 18 2014
Externally publishedYes
Event2013 IEEE International Conference on Industrial Engineering and Engineering Management, IEEM 2013 - Bangkok, Thailand
Duration: Dec 10 2013Dec 13 2013

Publication series

NameIEEE International Conference on Industrial Engineering and Engineering Management
ISSN (Print)2157-3611
ISSN (Electronic)2157-362X

Conference

Conference2013 IEEE International Conference on Industrial Engineering and Engineering Management, IEEM 2013
CountryThailand
CityBangkok
Period12/10/1312/13/13

Keywords

  • deadlock avoidance
  • multi-cluster tools
  • Petri nets
  • simulation
  • siphon

ASJC Scopus subject areas

  • Business, Management and Accounting (miscellaneous)
  • Industrial and Manufacturing Engineering
  • Safety, Risk, Reliability and Quality

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