Corn-shape carbon nanofibers with dense graphite synthesized by microwave plasma-enhanced chemical vapor deposition

Yasuhiko Hayashi, T. Tokunaga, T. Soga, T. Jimbo, Y. Yogata, S. Toh, K. Kaneko

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

The characterization of bias-enhanced microwave plasma enhanced chemical vapor deposition (BE-PECVD) grown corn-shape carbon nanofibers (CCNF) was studied using transmission electron microscopy (TEM), scanning electron microscopy (SEM) and Raman spectroscopy. The system consisted of a 2.45 GHz, 1.5 kW microwave power supply with a rectangular waveguide that was coupled to a stainless cylindrical growth chamber and molybdenum substrate holder with a radio-frequency graphite heater. The growth period was about 10 minutes, and the CCNF lengths ranges from 0.4 to 1.1 μm depending on the substrate temperature. The results indicate that the optimum substrate temperature is above 550°C to grow.

Original languageEnglish
Pages (from-to)2886-2888
Number of pages3
JournalApplied Physics Letters
Volume84
Issue number15
DOIs
Publication statusPublished - Apr 12 2004
Externally publishedYes

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corn
graphite
vapor deposition
microwaves
carbon
phytotrons
rectangular waveguides
holders
heaters
power supplies
molybdenum
radio frequencies
Raman spectroscopy
transmission electron microscopy
scanning electron microscopy
temperature

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Corn-shape carbon nanofibers with dense graphite synthesized by microwave plasma-enhanced chemical vapor deposition. / Hayashi, Yasuhiko; Tokunaga, T.; Soga, T.; Jimbo, T.; Yogata, Y.; Toh, S.; Kaneko, K.

In: Applied Physics Letters, Vol. 84, No. 15, 12.04.2004, p. 2886-2888.

Research output: Contribution to journalArticle

Hayashi, Yasuhiko ; Tokunaga, T. ; Soga, T. ; Jimbo, T. ; Yogata, Y. ; Toh, S. ; Kaneko, K. / Corn-shape carbon nanofibers with dense graphite synthesized by microwave plasma-enhanced chemical vapor deposition. In: Applied Physics Letters. 2004 ; Vol. 84, No. 15. pp. 2886-2888.
@article{79e9d04515064d1491389bf4138c5f7c,
title = "Corn-shape carbon nanofibers with dense graphite synthesized by microwave plasma-enhanced chemical vapor deposition",
abstract = "The characterization of bias-enhanced microwave plasma enhanced chemical vapor deposition (BE-PECVD) grown corn-shape carbon nanofibers (CCNF) was studied using transmission electron microscopy (TEM), scanning electron microscopy (SEM) and Raman spectroscopy. The system consisted of a 2.45 GHz, 1.5 kW microwave power supply with a rectangular waveguide that was coupled to a stainless cylindrical growth chamber and molybdenum substrate holder with a radio-frequency graphite heater. The growth period was about 10 minutes, and the CCNF lengths ranges from 0.4 to 1.1 μm depending on the substrate temperature. The results indicate that the optimum substrate temperature is above 550°C to grow.",
author = "Yasuhiko Hayashi and T. Tokunaga and T. Soga and T. Jimbo and Y. Yogata and S. Toh and K. Kaneko",
year = "2004",
month = "4",
day = "12",
doi = "10.1063/1.1666998",
language = "English",
volume = "84",
pages = "2886--2888",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "15",

}

TY - JOUR

T1 - Corn-shape carbon nanofibers with dense graphite synthesized by microwave plasma-enhanced chemical vapor deposition

AU - Hayashi, Yasuhiko

AU - Tokunaga, T.

AU - Soga, T.

AU - Jimbo, T.

AU - Yogata, Y.

AU - Toh, S.

AU - Kaneko, K.

PY - 2004/4/12

Y1 - 2004/4/12

N2 - The characterization of bias-enhanced microwave plasma enhanced chemical vapor deposition (BE-PECVD) grown corn-shape carbon nanofibers (CCNF) was studied using transmission electron microscopy (TEM), scanning electron microscopy (SEM) and Raman spectroscopy. The system consisted of a 2.45 GHz, 1.5 kW microwave power supply with a rectangular waveguide that was coupled to a stainless cylindrical growth chamber and molybdenum substrate holder with a radio-frequency graphite heater. The growth period was about 10 minutes, and the CCNF lengths ranges from 0.4 to 1.1 μm depending on the substrate temperature. The results indicate that the optimum substrate temperature is above 550°C to grow.

AB - The characterization of bias-enhanced microwave plasma enhanced chemical vapor deposition (BE-PECVD) grown corn-shape carbon nanofibers (CCNF) was studied using transmission electron microscopy (TEM), scanning electron microscopy (SEM) and Raman spectroscopy. The system consisted of a 2.45 GHz, 1.5 kW microwave power supply with a rectangular waveguide that was coupled to a stainless cylindrical growth chamber and molybdenum substrate holder with a radio-frequency graphite heater. The growth period was about 10 minutes, and the CCNF lengths ranges from 0.4 to 1.1 μm depending on the substrate temperature. The results indicate that the optimum substrate temperature is above 550°C to grow.

UR - http://www.scopus.com/inward/record.url?scp=2342612925&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=2342612925&partnerID=8YFLogxK

U2 - 10.1063/1.1666998

DO - 10.1063/1.1666998

M3 - Article

VL - 84

SP - 2886

EP - 2888

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 15

ER -