Corn-shape carbon nanofibers with dense graphite synthesized by microwave plasma-enhanced chemical vapor deposition

Y. Hayashi; T. Tokunaga; T. Soga; T. Jimbo; Y. Yogata; S. Toh; K. Kaneko

doi:10.1063/1.1666998

Corn-shape carbon nanofibers with dense graphite synthesized by microwave plasma-enhanced chemical vapor deposition

Y. Hayashi, T. Tokunaga, T. Soga, T. Jimbo, Y. Yogata, S. Toh, K. Kaneko

Research output: Contribution to journal › Article › peer-review

19 Citations (Scopus)

Abstract

The characterization of bias-enhanced microwave plasma enhanced chemical vapor deposition (BE-PECVD) grown corn-shape carbon nanofibers (CCNF) was studied using transmission electron microscopy (TEM), scanning electron microscopy (SEM) and Raman spectroscopy. The system consisted of a 2.45 GHz, 1.5 kW microwave power supply with a rectangular waveguide that was coupled to a stainless cylindrical growth chamber and molybdenum substrate holder with a radio-frequency graphite heater. The growth period was about 10 minutes, and the CCNF lengths ranges from 0.4 to 1.1 μm depending on the substrate temperature. The results indicate that the optimum substrate temperature is above 550°C to grow.

Original language	English
Pages (from-to)	2886-2888
Number of pages	3
Journal	Applied Physics Letters
Volume	84
Issue number	15
DOIs	https://doi.org/10.1063/1.1666998
Publication status	Published - Apr 12 2004
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Corn-shape carbon nanofibers with dense graphite synthesized by microwave plasma-enhanced chemical vapor deposition",

abstract = "The characterization of bias-enhanced microwave plasma enhanced chemical vapor deposition (BE-PECVD) grown corn-shape carbon nanofibers (CCNF) was studied using transmission electron microscopy (TEM), scanning electron microscopy (SEM) and Raman spectroscopy. The system consisted of a 2.45 GHz, 1.5 kW microwave power supply with a rectangular waveguide that was coupled to a stainless cylindrical growth chamber and molybdenum substrate holder with a radio-frequency graphite heater. The growth period was about 10 minutes, and the CCNF lengths ranges from 0.4 to 1.1 μm depending on the substrate temperature. The results indicate that the optimum substrate temperature is above 550°C to grow.",

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AU - Hayashi, Y.

AU - Tokunaga, T.

AU - Soga, T.

AU - Jimbo, T.

AU - Yogata, Y.

AU - Toh, S.

AU - Kaneko, K.

PY - 2004/4/12

Y1 - 2004/4/12

N2 - The characterization of bias-enhanced microwave plasma enhanced chemical vapor deposition (BE-PECVD) grown corn-shape carbon nanofibers (CCNF) was studied using transmission electron microscopy (TEM), scanning electron microscopy (SEM) and Raman spectroscopy. The system consisted of a 2.45 GHz, 1.5 kW microwave power supply with a rectangular waveguide that was coupled to a stainless cylindrical growth chamber and molybdenum substrate holder with a radio-frequency graphite heater. The growth period was about 10 minutes, and the CCNF lengths ranges from 0.4 to 1.1 μm depending on the substrate temperature. The results indicate that the optimum substrate temperature is above 550°C to grow.

AB - The characterization of bias-enhanced microwave plasma enhanced chemical vapor deposition (BE-PECVD) grown corn-shape carbon nanofibers (CCNF) was studied using transmission electron microscopy (TEM), scanning electron microscopy (SEM) and Raman spectroscopy. The system consisted of a 2.45 GHz, 1.5 kW microwave power supply with a rectangular waveguide that was coupled to a stainless cylindrical growth chamber and molybdenum substrate holder with a radio-frequency graphite heater. The growth period was about 10 minutes, and the CCNF lengths ranges from 0.4 to 1.1 μm depending on the substrate temperature. The results indicate that the optimum substrate temperature is above 550°C to grow.

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Corn-shape carbon nanofibers with dense graphite synthesized by microwave plasma-enhanced chemical vapor deposition

Abstract

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