Abstract
The characterization of bias-enhanced microwave plasma enhanced chemical vapor deposition (BE-PECVD) grown corn-shape carbon nanofibers (CCNF) was studied using transmission electron microscopy (TEM), scanning electron microscopy (SEM) and Raman spectroscopy. The system consisted of a 2.45 GHz, 1.5 kW microwave power supply with a rectangular waveguide that was coupled to a stainless cylindrical growth chamber and molybdenum substrate holder with a radio-frequency graphite heater. The growth period was about 10 minutes, and the CCNF lengths ranges from 0.4 to 1.1 μm depending on the substrate temperature. The results indicate that the optimum substrate temperature is above 550°C to grow.
| Original language | English |
|---|---|
| Pages (from-to) | 2886-2888 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 84 |
| Issue number | 15 |
| DOIs | |
| Publication status | Published - Apr 12 2004 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
Cite this
Corn-shape carbon nanofibers with dense graphite synthesized by microwave plasma-enhanced chemical vapor deposition. / Hayashi, Yasuhiko; Tokunaga, T.; Soga, T.; Jimbo, T.; Yogata, Y.; Toh, S.; Kaneko, K.
In: Applied Physics Letters, Vol. 84, No. 15, 12.04.2004, p. 2886-2888.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Corn-shape carbon nanofibers with dense graphite synthesized by microwave plasma-enhanced chemical vapor deposition
AU - Hayashi, Yasuhiko
AU - Tokunaga, T.
AU - Soga, T.
AU - Jimbo, T.
AU - Yogata, Y.
AU - Toh, S.
AU - Kaneko, K.
PY - 2004/4/12
Y1 - 2004/4/12
N2 - The characterization of bias-enhanced microwave plasma enhanced chemical vapor deposition (BE-PECVD) grown corn-shape carbon nanofibers (CCNF) was studied using transmission electron microscopy (TEM), scanning electron microscopy (SEM) and Raman spectroscopy. The system consisted of a 2.45 GHz, 1.5 kW microwave power supply with a rectangular waveguide that was coupled to a stainless cylindrical growth chamber and molybdenum substrate holder with a radio-frequency graphite heater. The growth period was about 10 minutes, and the CCNF lengths ranges from 0.4 to 1.1 μm depending on the substrate temperature. The results indicate that the optimum substrate temperature is above 550°C to grow.
AB - The characterization of bias-enhanced microwave plasma enhanced chemical vapor deposition (BE-PECVD) grown corn-shape carbon nanofibers (CCNF) was studied using transmission electron microscopy (TEM), scanning electron microscopy (SEM) and Raman spectroscopy. The system consisted of a 2.45 GHz, 1.5 kW microwave power supply with a rectangular waveguide that was coupled to a stainless cylindrical growth chamber and molybdenum substrate holder with a radio-frequency graphite heater. The growth period was about 10 minutes, and the CCNF lengths ranges from 0.4 to 1.1 μm depending on the substrate temperature. The results indicate that the optimum substrate temperature is above 550°C to grow.
UR - http://www.scopus.com/inward/record.url?scp=2342612925&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=2342612925&partnerID=8YFLogxK
U2 - 10.1063/1.1666998
DO - 10.1063/1.1666998
M3 - Article
AN - SCOPUS:2342612925
VL - 84
SP - 2886
EP - 2888
JO - Applied Physics Letters
JF - Applied Physics Letters
SN - 0003-6951
IS - 15
ER -