The characterization of bias-enhanced microwave plasma enhanced chemical vapor deposition (BE-PECVD) grown corn-shape carbon nanofibers (CCNF) was studied using transmission electron microscopy (TEM), scanning electron microscopy (SEM) and Raman spectroscopy. The system consisted of a 2.45 GHz, 1.5 kW microwave power supply with a rectangular waveguide that was coupled to a stainless cylindrical growth chamber and molybdenum substrate holder with a radio-frequency graphite heater. The growth period was about 10 minutes, and the CCNF lengths ranges from 0.4 to 1.1 μm depending on the substrate temperature. The results indicate that the optimum substrate temperature is above 550°C to grow.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)