Conversion efficiency of LPP sources

Katsunobu Nishihara, Akira Sasaki, Atsushi Sunahara, Takeshi Nishikawa

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Cite this

Nishihara, K., Sasaki, A., Sunahara, A., & Nishikawa, T. (2006). Conversion efficiency of LPP sources. In EUV Sources for Lithography (pp. 339-370). SPIE. https://doi.org/10.1117/3.613774.Ch11

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title = "Conversion efficiency of LPP sources",

author = "Katsunobu Nishihara and Akira Sasaki and Atsushi Sunahara and Takeshi Nishikawa",

year = "2006",

month = feb,

day = "23",

doi = "10.1117/3.613774.Ch11",

language = "English",

isbn = "9780819480712",

pages = "339--370",

booktitle = "EUV Sources for Lithography",

publisher = "SPIE",

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T1 - Conversion efficiency of LPP sources

AU - Nishihara, Katsunobu

AU - Sasaki, Akira

AU - Sunahara, Atsushi

AU - Nishikawa, Takeshi

PY - 2006/2/23

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SN - 9780819480712

SN - 0819458457

SN - 9780819458452

SP - 339

EP - 370

BT - EUV Sources for Lithography

PB - SPIE

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