Conversion efficiency of LPP sources

Katsunobu Nishihara, Akira Sasaki, Atsushi Sunahara, Takeshi Nishikawa

Research output: Chapter in Book/Report/Conference proceeding › Chapter

ASJC Scopus subject areas

@inbook{2d39fba924fc4dcb8031a98b773d1b96,

title = "Conversion efficiency of LPP sources",

author = "Katsunobu Nishihara and Akira Sasaki and Atsushi Sunahara and Takeshi Nishikawa",

year = "2006",

month = feb,

day = "23",

doi = "10.1117/3.613774.Ch11",

language = "English",

isbn = "0819458457",

pages = "339--370",

booktitle = "EUV Sources for Lithography",

publisher = "SPIE",

}

TY - CHAP

T1 - Conversion efficiency of LPP sources

AU - Nishihara, Katsunobu

AU - Sasaki, Akira

AU - Sunahara, Atsushi

AU - Nishikawa, Takeshi

PY - 2006/2/23

Y1 - 2006/2/23

UR - http://www.scopus.com/inward/record.url?scp=84960252315&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84960252315&partnerID=8YFLogxK

U2 - 10.1117/3.613774.Ch11

DO - 10.1117/3.613774.Ch11

M3 - Chapter

AN - SCOPUS:84960252315

SN - 0819458457

SN - 9780819458452

SP - 339

EP - 370

BT - EUV Sources for Lithography

PB - SPIE

ER -