Conversion efficiency of LPP sources

Katsunobu Nishihara; Akira Sasaki; Atsushi Sunahara; Takeshi Nishikawa

doi:10.1117/3.613774.Ch11

Conversion efficiency of LPP sources

Katsunobu Nishihara, Akira Sasaki, Atsushi Sunahara, Takeshi Nishikawa

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Original language	English
Title of host publication	EUV Sources for Lithography
Publisher	SPIE
Pages	339-370
Number of pages	32
ISBN (Print)	9780819480712, 0819458457, 9780819458452
DOIs	https://doi.org/10.1117/3.613774.Ch11
Publication status	Published - Feb 23 2006

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Conversion efficiency

ASJC Scopus subject areas

Engineering(all)

Cite this

Nishihara, K., Sasaki, A., Sunahara, A., & Nishikawa, T. (2006). Conversion efficiency of LPP sources. In EUV Sources for Lithography (pp. 339-370). SPIE. https://doi.org/10.1117/3.613774.Ch11

Conversion efficiency of LPP sources. / Nishihara, Katsunobu; Sasaki, Akira; Sunahara, Atsushi; Nishikawa, Takeshi.

EUV Sources for Lithography. SPIE, 2006. p. 339-370.

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Nishihara, K, Sasaki, A, Sunahara, A & Nishikawa, T 2006, Conversion efficiency of LPP sources. in EUV Sources for Lithography. SPIE, pp. 339-370. https://doi.org/10.1117/3.613774.Ch11

Nishihara K, Sasaki A, Sunahara A, Nishikawa T. Conversion efficiency of LPP sources. In EUV Sources for Lithography. SPIE. 2006. p. 339-370 https://doi.org/10.1117/3.613774.Ch11

Nishihara, Katsunobu ; Sasaki, Akira ; Sunahara, Atsushi ; Nishikawa, Takeshi. / Conversion efficiency of LPP sources. EUV Sources for Lithography. SPIE, 2006. pp. 339-370

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Access to Document

10.1117/3.613774.Ch11