Conversion efficiency of LPP sources

Katsunobu Nishihara, Akira Sasaki, Atsushi Sunahara, Takeshi Nishikawa

Research output: Chapter in Book/Report/Conference proceedingChapter

18 Citations (Scopus)
Original languageEnglish
Title of host publicationEUV Sources for Lithography
PublisherSPIE
Pages339-370
Number of pages32
ISBN (Print)9780819480712, 0819458457, 9780819458452
DOIs
Publication statusPublished - Feb 23 2006

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Nishihara, K., Sasaki, A., Sunahara, A., & Nishikawa, T. (2006). Conversion efficiency of LPP sources. In EUV Sources for Lithography (pp. 339-370). SPIE. https://doi.org/10.1117/3.613774.Ch11