Control of a pneumatic isolation table by flow meter: Improvement of repeatability in various switching points of the feedforward compensator

Habiburahman Shirani, Yukinori Nakamura, Shinji Wakui

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, we consider the compensation of the pneumatic isolation table's fluctuation caused by switching of the feedforward compensator. The feedforward and table's acceleration paths are combined and the combined signal is sent through a pseudo integrator and a damping gain to the voice coil motor. Retuning of the feedforward compensator's gains are investigated for the suppression of flow disturbance. The effectiveness of this control scheme for the compensation of switching is demonstrated by experimental results.

Original languageEnglish
Title of host publication2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
Pages609-614
Number of pages6
Publication statusPublished - 2012
Externally publishedYes
Event2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012 - Tokyo, Japan
Duration: Sep 18 2012Sep 21 2012

Other

Other2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
CountryJapan
CityTokyo
Period9/18/129/21/12

Fingerprint

Pneumatics
Damping
Compensation and Redress

Keywords

  • Damping loop
  • Feedforward compensator
  • Pneumatic isolation table
  • Supplied air
  • Switching
  • Voice coil motor

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Shirani, H., Nakamura, Y., & Wakui, S. (2012). Control of a pneumatic isolation table by flow meter: Improvement of repeatability in various switching points of the feedforward compensator. In 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012 (pp. 609-614). [6329651]

Control of a pneumatic isolation table by flow meter : Improvement of repeatability in various switching points of the feedforward compensator. / Shirani, Habiburahman; Nakamura, Yukinori; Wakui, Shinji.

2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012. 2012. p. 609-614 6329651.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shirani, H, Nakamura, Y & Wakui, S 2012, Control of a pneumatic isolation table by flow meter: Improvement of repeatability in various switching points of the feedforward compensator. in 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012., 6329651, pp. 609-614, 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012, Tokyo, Japan, 9/18/12.
Shirani H, Nakamura Y, Wakui S. Control of a pneumatic isolation table by flow meter: Improvement of repeatability in various switching points of the feedforward compensator. In 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012. 2012. p. 609-614. 6329651
Shirani, Habiburahman ; Nakamura, Yukinori ; Wakui, Shinji. / Control of a pneumatic isolation table by flow meter : Improvement of repeatability in various switching points of the feedforward compensator. 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012. 2012. pp. 609-614
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