TY - GEN
T1 - Control of a pneumatic isolation table by flow meter
T2 - 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
AU - Shirani, Habiburahman
AU - Nakamura, Yukinori
AU - Wakui, Shinji
PY - 2012/11/27
Y1 - 2012/11/27
N2 - In this paper, we consider the compensation of the pneumatic isolation table's fluctuation caused by switching of the feedforward compensator. The feedforward and table's acceleration paths are combined and the combined signal is sent through a pseudo integrator and a damping gain to the voice coil motor. Retuning of the feedforward compensator's gains are investigated for the suppression of flow disturbance. The effectiveness of this control scheme for the compensation of switching is demonstrated by experimental results.
AB - In this paper, we consider the compensation of the pneumatic isolation table's fluctuation caused by switching of the feedforward compensator. The feedforward and table's acceleration paths are combined and the combined signal is sent through a pseudo integrator and a damping gain to the voice coil motor. Retuning of the feedforward compensator's gains are investigated for the suppression of flow disturbance. The effectiveness of this control scheme for the compensation of switching is demonstrated by experimental results.
KW - Damping loop
KW - Feedforward compensator
KW - Pneumatic isolation table
KW - Supplied air
KW - Switching
KW - Voice coil motor
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UR - http://www.scopus.com/inward/citedby.url?scp=84869811977&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84869811977
SN - 9780955529382
T3 - 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
SP - 609
EP - 614
BT - 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
Y2 - 18 September 2012 through 21 September 2012
ER -