Compensation for the effect of feedforward controller's switching on isolation table using flow meter

Habiburahman Shirani, Yukinori Nakamura, Shinji Wakui

Research output: Contribution to journalArticle

1 Citation (Scopus)


This paper considers a control scheme for the suppression of pneumatic isolation table's fluctuation induced by switching of the feedforward controller. The table acceleration and feedforward paths are added and the combined signal is sent to a damping integrator and gain. The damping integrator, besides generating a damping signal from acceleration signal, also avoids a large jump/drop of the feedforward signal during switching of the feedforward controller. Performance of this control scheme is evaluated by experiments while comparing with conventional control schemes. In addition, retuning of the feedforward compensator's gains is investigated. Based on the experimental results, it is shown that this control scheme can suppress both flow disturbances and switching of the feedforward controller.

Original languageEnglish
Pages (from-to)56-63
Number of pages8
JournalInternational Journal of Advanced Mechatronic Systems
Issue number1
Publication statusPublished - Feb 1 2012
Externally publishedYes



  • Feedforward compensator
  • Flow disturbance
  • Flow meter
  • Pneumatic isolation table
  • Switching
  • VCM
  • Voice coil motor

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering

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