Charging Simulation of Micro-structured Pattern in Ion Implantation

Shigeki Sakai, Hiroshi Tsuji, Yasuhito Gotoh, Yoshitaka Toyota, Junzo Ishikawa, Masayasu Tanjyo, Koji Matsuda

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)228-230
Number of pages3
JournalShinku
Volume38
Issue number3
DOIs
Publication statusPublished - 1995
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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