Charging Potential Measurement of Photoresist-Layer Surface during Negative-Ion Implantation from Ion-Induced Secondary Electron Energy Analysis

Hiroshi Tsuji, Shoji Nagumo, Yoshitaka Toyota, Shigeki Sakai, Yasuhito Gotoh, Junzo Ishikawa

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)221-223
Number of pages3
JournalShinku
Volume38
Issue number3
DOIs
Publication statusPublished - 1995
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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