Charge-state and isotope effects on the recovery process of stress-induced reorientation of Pt-H2 complex in silicon

Namula Bao, Yoichi Kamiura, Yoshifumi Yamashita, Takeshi Ishiyama

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We have studied the local motion of hydrogen around a platinum impurity in Si, which was directly probed by measuring the recovery process of stress-induced reorientation of the Pt-H2 complex by isothermal deep-level transient spectroscopy (IT-DLTS). We found that hydrogen more easily moved in the singly negative charge state of the Pt-H2 complex than in the doubly negative charge state, and determined the activation energies for the recovery process to be 0.28 and 0.4 eV in the singly and doubly negative charge states, respectively, from a series of isothermal annealing experiments. We also found that the recovery rate of the Pt-D2 complex in the singly negative charge state is 80% that of the Pt-H2 complex with the same activation energy of 0.28 eV. This isotope effect clearly proves that both complexes have the same atomic configuration and that their recovery process is governed by the atomic jump of hydrogen (deuterium).

Original languageEnglish
Pages (from-to)907-912
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number3 A
DOIs
Publication statusPublished - Mar 8 2007

Keywords

  • Charge state
  • Hydrogen motion
  • Platinum
  • Si
  • Stress

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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