Original language | English |
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Pages (from-to) | 1624-1622 |
Number of pages | 23 |
Journal | Jpn. J. Appl. Phys. Part1 |
Volume | Vol.46 |
Issue number | 4A issue |
Publication status | Published - 2007 |
Characteristic of Strained SiGe Film Preventing Hydrogen from Penetrating into Si Substrate Detected by Spreading Resistance Method
Research output: Contribution to journal › Article
2
Citations
(Scopus)