Characteristic of Strained SiGe Film Preventing Hydrogen from Penetrating into Si Substrate Detected by Spreading Resistance Method

Research output: Contribution to journalArticle

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)1624-1622
Number of pages23
JournalJpn. J. Appl. Phys. Part1
VolumeVol.46
Issue number4A issue
Publication statusPublished - 2007

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