Characteristic of Strained SiGe Film Preventing Hydrogen from Penetrating into Si Substrate Detected by Spreading Resistance Method

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@article{6e7c0054b21b4d869eb1fd2425a0603a,

title = "Characteristic of Strained SiGe Film Preventing Hydrogen from Penetrating into Si Substrate Detected by Spreading Resistance Method",

author = "Yoshifumi Yamashita",

year = "2007",

language = "English",

volume = "Vol.46",

pages = "1624--1622",

journal = "Jpn. J. Appl. Phys. Part1",

number = "4A issue",

}