Broadband Anti-Reflection Moth-Eye Structures Realized in the above 1 THz Region by Laser Processing

Haruyuki Sakurai; Kuniaki Konishi; Mizuho Matoba; Ryota Takaku; Yuki Sakurai; Nobuhiko Katayama; Tomotake Matsumura; Junji Yumoto; Makoto Kuwata-Gonokami

doi:10.1109/IRMMW-THz46771.2020.9370908

Broadband Anti-Reflection Moth-Eye Structures Realized in the above 1 THz Region by Laser Processing

Haruyuki Sakurai, Kuniaki Konishi, Mizuho Matoba, Ryota Takaku, Yuki Sakurai, Nobuhiko Katayama, Tomotake Matsumura, Junji Yumoto, Makoto Kuwata-Gonokami

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We fabricate terahertz (THz) moth-eye antireflection (AR) structures on the surface of high-resistivity silicon via low-power femtosecond laser processing. We observed broadband AR performance at near-unity above 0.8 THz, where the upper value was measurement limited. Such values are unprecedented for laser fabricated samples, and shows the high potential of laser processing-based approaches for THz optics fabrication.

Original language	English
Title of host publication	2020 45th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2020
Publisher	IEEE Computer Society
Pages	699-700
Number of pages	2
ISBN (Electronic)	9781728166209
DOIs	https://doi.org/10.1109/IRMMW-THz46771.2020.9370908
Publication status	Published - Nov 8 2020
Externally published	Yes
Event	45th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2020 - Virtual, Buffalo, United States Duration: Nov 8 2020 → Nov 13 2020

Publication series

Name	International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
Volume	2020-November
ISSN (Print)	2162-2027
ISSN (Electronic)	2162-2035

Conference

Conference	45th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2020
Country/Territory	United States
City	Virtual, Buffalo
Period	11/8/20 → 11/13/20

ASJC Scopus subject areas

Energy Engineering and Power Technology
Electrical and Electronic Engineering

Access to Document

10.1109/IRMMW-THz46771.2020.9370908

Cite this

Sakurai, H., Konishi, K., Matoba, M., Takaku, R., Sakurai, Y., Katayama, N., Matsumura, T., Yumoto, J., & Kuwata-Gonokami, M. (2020). Broadband Anti-Reflection Moth-Eye Structures Realized in the above 1 THz Region by Laser Processing. In 2020 45th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2020 (pp. 699-700). [9370908] (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz; Vol. 2020-November). IEEE Computer Society. https://doi.org/10.1109/IRMMW-THz46771.2020.9370908

Broadband Anti-Reflection Moth-Eye Structures Realized in the above 1 THz Region by Laser Processing. / Sakurai, Haruyuki; Konishi, Kuniaki; Matoba, Mizuho et al.

2020 45th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2020. IEEE Computer Society, 2020. p. 699-700 9370908 (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz; Vol. 2020-November).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sakurai, H, Konishi, K, Matoba, M, Takaku, R, Sakurai, Y, Katayama, N, Matsumura, T, Yumoto, J & Kuwata-Gonokami, M 2020, Broadband Anti-Reflection Moth-Eye Structures Realized in the above 1 THz Region by Laser Processing. in 2020 45th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2020., 9370908, International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, vol. 2020-November, IEEE Computer Society, pp. 699-700, 45th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2020, Virtual, Buffalo, United States, 11/8/20. https://doi.org/10.1109/IRMMW-THz46771.2020.9370908

Sakurai H, Konishi K, Matoba M, Takaku R, Sakurai Y, Katayama N et al. Broadband Anti-Reflection Moth-Eye Structures Realized in the above 1 THz Region by Laser Processing. In 2020 45th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2020. IEEE Computer Society. 2020. p. 699-700. 9370908. (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz). doi: 10.1109/IRMMW-THz46771.2020.9370908

Sakurai, Haruyuki ; Konishi, Kuniaki ; Matoba, Mizuho et al. / Broadband Anti-Reflection Moth-Eye Structures Realized in the above 1 THz Region by Laser Processing. 2020 45th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2020. IEEE Computer Society, 2020. pp. 699-700 (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz).

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abstract = "We fabricate terahertz (THz) moth-eye antireflection (AR) structures on the surface of high-resistivity silicon via low-power femtosecond laser processing. We observed broadband AR performance at near-unity above 0.8 THz, where the upper value was measurement limited. Such values are unprecedented for laser fabricated samples, and shows the high potential of laser processing-based approaches for THz optics fabrication.",

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AU - Katayama, Nobuhiko

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AB - We fabricate terahertz (THz) moth-eye antireflection (AR) structures on the surface of high-resistivity silicon via low-power femtosecond laser processing. We observed broadband AR performance at near-unity above 0.8 THz, where the upper value was measurement limited. Such values are unprecedented for laser fabricated samples, and shows the high potential of laser processing-based approaches for THz optics fabrication.

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Broadband Anti-Reflection Moth-Eye Structures Realized in the above 1 THz Region by Laser Processing

Abstract

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Conference

ASJC Scopus subject areas

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