Auger-electron-spectroscopy (AES) measurements on anodically oxidized layers of single-crystal GaP

Akira Okada, Yasuhide Ohnuki, Taroh Inada

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Anodically oxidized layers were grown on GaP (111) surfaces from a solution of N-methyl acetamide, H2O, NH4OH, and citric acid having a pH value of 9.0. The layer growth rate was 11 Å/V with a constant current density of 0.5 mA/cm2. Auger electron spectra and depth profiles of the components were measured. The phosphorous L3M 2,3M2,3 transition at 117 eV suffered a chemical shift in the oxide layers, and the shape of the first derivative of the Auger signal was completely different from that observed with P in GaP. Observation of the phosphorous K L2,3L2,3 transition at 1858 eV indicated that the ratio of P/Ga had a constant value throughout the oxide layers. Only the oxygen concentrations varied along with the depth.

Original languageEnglish
Pages (from-to)447-449
Number of pages3
JournalApplied Physics Letters
Volume33
Issue number5
DOIs
Publication statusPublished - 1978
Externally publishedYes

Fingerprint

Auger spectroscopy
electron spectroscopy
single crystals
acids
oxides
citric acid
chemical equilibrium
current density
oxygen
profiles
electrons

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Auger-electron-spectroscopy (AES) measurements on anodically oxidized layers of single-crystal GaP. / Okada, Akira; Ohnuki, Yasuhide; Inada, Taroh.

In: Applied Physics Letters, Vol. 33, No. 5, 1978, p. 447-449.

Research output: Contribution to journalArticle

@article{0d03ac987d624c5a8c4d0fa913c68424,
title = "Auger-electron-spectroscopy (AES) measurements on anodically oxidized layers of single-crystal GaP",
abstract = "Anodically oxidized layers were grown on GaP (111) surfaces from a solution of N-methyl acetamide, H2O, NH4OH, and citric acid having a pH value of 9.0. The layer growth rate was 11 {\AA}/V with a constant current density of 0.5 mA/cm2. Auger electron spectra and depth profiles of the components were measured. The phosphorous L3M 2,3M2,3 transition at 117 eV suffered a chemical shift in the oxide layers, and the shape of the first derivative of the Auger signal was completely different from that observed with P in GaP. Observation of the phosphorous K L2,3L2,3 transition at 1858 eV indicated that the ratio of P/Ga had a constant value throughout the oxide layers. Only the oxygen concentrations varied along with the depth.",
author = "Akira Okada and Yasuhide Ohnuki and Taroh Inada",
year = "1978",
doi = "10.1063/1.90373",
language = "English",
volume = "33",
pages = "447--449",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "5",

}

TY - JOUR

T1 - Auger-electron-spectroscopy (AES) measurements on anodically oxidized layers of single-crystal GaP

AU - Okada, Akira

AU - Ohnuki, Yasuhide

AU - Inada, Taroh

PY - 1978

Y1 - 1978

N2 - Anodically oxidized layers were grown on GaP (111) surfaces from a solution of N-methyl acetamide, H2O, NH4OH, and citric acid having a pH value of 9.0. The layer growth rate was 11 Å/V with a constant current density of 0.5 mA/cm2. Auger electron spectra and depth profiles of the components were measured. The phosphorous L3M 2,3M2,3 transition at 117 eV suffered a chemical shift in the oxide layers, and the shape of the first derivative of the Auger signal was completely different from that observed with P in GaP. Observation of the phosphorous K L2,3L2,3 transition at 1858 eV indicated that the ratio of P/Ga had a constant value throughout the oxide layers. Only the oxygen concentrations varied along with the depth.

AB - Anodically oxidized layers were grown on GaP (111) surfaces from a solution of N-methyl acetamide, H2O, NH4OH, and citric acid having a pH value of 9.0. The layer growth rate was 11 Å/V with a constant current density of 0.5 mA/cm2. Auger electron spectra and depth profiles of the components were measured. The phosphorous L3M 2,3M2,3 transition at 117 eV suffered a chemical shift in the oxide layers, and the shape of the first derivative of the Auger signal was completely different from that observed with P in GaP. Observation of the phosphorous K L2,3L2,3 transition at 1858 eV indicated that the ratio of P/Ga had a constant value throughout the oxide layers. Only the oxygen concentrations varied along with the depth.

UR - http://www.scopus.com/inward/record.url?scp=0001248582&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0001248582&partnerID=8YFLogxK

U2 - 10.1063/1.90373

DO - 10.1063/1.90373

M3 - Article

AN - SCOPUS:0001248582

VL - 33

SP - 447

EP - 449

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 5

ER -