Attitude control of pneumatic active anti-vibration apparatuses with two degrees-of-freedom in shutdown process

Satoru Goto, Yukinori Nakamura, Shinji Wakui

Research output: Contribution to conferencePaper

1 Citation (Scopus)

Abstract

For the ultra-precision machining, semiconductor exposure machines employ the pneumatic active anti-vibration apparatuses (AVAs), which have air springs. In industrial scenes, when the vibration due to earthquake is observed, the AVA is automatically stopped by exhausting air. However, the difference of time delays in the response of the air springs causes the undesirable rotational motion of an isolated table. This paper considers the attitude control of the AVA including different time delays during shutdown process. To avoid the rotation of the isolated table, reference trajectory is shaped. It is verified that the range of the rotational angle in the shutdown of the AVA can be reduced by using the proposed method.

Original languageEnglish
Pages119-124
Number of pages6
DOIs
Publication statusPublished - Jun 16 2015
Externally publishedYes
Event2015 IEEE International Conference on Industrial Technology, ICIT 2015 - Seville, Spain
Duration: Mar 17 2015Mar 19 2015

Other

Other2015 IEEE International Conference on Industrial Technology, ICIT 2015
CountrySpain
CitySeville
Period3/17/153/19/15

ASJC Scopus subject areas

  • Computer Science Applications
  • Electrical and Electronic Engineering

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    Goto, S., Nakamura, Y., & Wakui, S. (2015). Attitude control of pneumatic active anti-vibration apparatuses with two degrees-of-freedom in shutdown process. 119-124. Paper presented at 2015 IEEE International Conference on Industrial Technology, ICIT 2015, Seville, Spain. https://doi.org/10.1109/ICIT.2015.7125086