Attitude control of pneumatic active anti-vibration apparatuses with two degrees-of-freedom in shutdown process

Satoru Goto, Yukinori Nakamura, Shinji Wakui

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

For the ultra-precision machining, semiconductor exposure machines employ the pneumatic active anti-vibration apparatuses (AVAs), which have air springs. In industrial scenes, when the vibration due to earthquake is observed, the AVA is automatically stopped by exhausting air. However, the difference of time delays in the response of the air springs causes the undesirable rotational motion of an isolated table. This paper considers the attitude control of the AVA including different time delays during shutdown process. To avoid the rotation of the isolated table, reference trajectory is shaped. It is verified that the range of the rotational angle in the shutdown of the AVA can be reduced by using the proposed method.

Original languageEnglish
Title of host publication2015 IEEE International Conference on Industrial Technology, ICIT 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages119-124
Number of pages6
Volume2015-June
EditionJune
DOIs
Publication statusPublished - Jun 16 2015
Externally publishedYes
Event2015 IEEE International Conference on Industrial Technology, ICIT 2015 - Seville, Spain
Duration: Mar 17 2015Mar 19 2015

Other

Other2015 IEEE International Conference on Industrial Technology, ICIT 2015
CountrySpain
CitySeville
Period3/17/153/19/15

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Computer Science Applications

Cite this

Goto, S., Nakamura, Y., & Wakui, S. (2015). Attitude control of pneumatic active anti-vibration apparatuses with two degrees-of-freedom in shutdown process. In 2015 IEEE International Conference on Industrial Technology, ICIT 2015 (June ed., Vol. 2015-June, pp. 119-124). [7125086] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICIT.2015.7125086