Atomic processes and equation of state of high Z plasmas for EUV sources and their effects on the spatial and temporal evolution of the plasmas

Akira Sasaki, Atushi Sunahara, Hiroyuki Furukawa, Katsunobu Nishihara, Takeshi Nishikawa, Fumihiro Koike

Research output: Contribution to journalArticle

Abstract

Laser-produced plasma (LPP) extreme ultraviolet (EUV) light sources have been intensively investigated due to potential application to next-generation semiconductor technology. Current studies focus on the atomic processes and hydrodynamics of plasmas to develop shorter wavelength sources at λ = 6.x nm as well as to improve the conversion efficiency (CE) of λ = 13.5 nm sources. This paper examines the atomic processes of mid-z elements, which are potential candidates for λ = 6.x nm source using n=3-3 transitions. Furthermore, a method to calculate the hydrodynamics of the plasmas in terms of the initial interaction between a relatively weak prepulse laser is presented.

Original languageEnglish
Article number012099
JournalJournal of Physics: Conference Series
Volume688
Issue number1
DOIs
Publication statusPublished - Apr 1 2016

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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