TY - JOUR
T1 - Atomic modeling of the plasma EUV sources
AU - Sasaki, Akira
AU - Sunahara, Atsushi
AU - Nishihara, Katsunobu
AU - Nishikawa, Takeshi
AU - Fujima, Kazumi
AU - Kagawa, Takashi
AU - Koike, Fumihiro
AU - Tanuma, Hajime
PY - 2007/5
Y1 - 2007/5
N2 - An atomic model of tin plasmas as a part of the numerical simulation of laser produced plasma (LPP) extreme ultra-violet (EUV) source is presented. The emissivity and opacity of the plasma are calculated and are used in the radiation hydrodynamics simulation. In order to establish a reliable numerical model of the EUV source, which reproduces the experimental emission spectrum and can predict conversion efficiency in 2% bandwidth at λ = 13.5 nm, the wavelengths of strong resonance lines in the model have been improved. The effect of the configuration interaction is investigated theoretically, and the result of calculation is verified through comparisons with detailed spectroscopic measurements. The contribution of satellite lines to the EUV emission is also investigated, along with a heuristic method to determine the dominant emission channels. The multiply and inner-shell excited states of each charge state of tin ions are determined, which have a significant contribution to the ionization balance as well as the emissivity and opacity.
AB - An atomic model of tin plasmas as a part of the numerical simulation of laser produced plasma (LPP) extreme ultra-violet (EUV) source is presented. The emissivity and opacity of the plasma are calculated and are used in the radiation hydrodynamics simulation. In order to establish a reliable numerical model of the EUV source, which reproduces the experimental emission spectrum and can predict conversion efficiency in 2% bandwidth at λ = 13.5 nm, the wavelengths of strong resonance lines in the model have been improved. The effect of the configuration interaction is investigated theoretically, and the result of calculation is verified through comparisons with detailed spectroscopic measurements. The contribution of satellite lines to the EUV emission is also investigated, along with a heuristic method to determine the dominant emission channels. The multiply and inner-shell excited states of each charge state of tin ions are determined, which have a significant contribution to the ionization balance as well as the emissivity and opacity.
KW - Collisional-radiative model
KW - EUV lithography
KW - Laser produced plasma
KW - Opacity
KW - Plasma spectroscopy
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U2 - 10.1016/j.hedp.2007.02.031
DO - 10.1016/j.hedp.2007.02.031
M3 - Article
AN - SCOPUS:34248570328
SN - 1574-1818
VL - 3
SP - 250
EP - 255
JO - High Energy Density Physics
JF - High Energy Density Physics
IS - 1-2
ER -