Applicability of reactive ion etching to fabrication of micro-prism-array for dioptrics system

Ryuto Fujie, Akira Okada, Yoshiyuki Uno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This study aims to develop a new lens system using an integrated arrangement of micro-prism-cell (MPC) and to obtain similar focusing performance as an optical lens. In this lens system, the respective prisms have different apex angle which is fabricated by precision processing. Further development of this system would make it possible to manufacture a multifocal lens in a small area, which leads to wide applications not only in optical devices, such as glasses and intraocular lenses, but also in pickup lenses for optical storage and so on. In this study, a new software was first developed to design a micro-prism-array (MPA), in which the apex angles of respective MPC were precisely computed. Based on the computed design, the photo-resist shape pattern was produced on trial by reactive ion etching (RIE). Then, the formation of a smooth prism slope was tried by using the resist mask whose shape was whittled away with an O2 (oxygen) RIE. Then, as a preliminary experiment, the apex angle was experimentally optimized with varying the etching conditions. In the experiment, the size of each MPC was set to 10μm, and the formation of the MPC, which had different apex angles ranging from zero to about 15° was achieved by four process stages of the RIE. A good focusing performance of the manufactured MPA could be obtained despite a diffusion of light. Nevertheless, the performance is not yet up to the specified design, and there remain some problems to be solved in order to achieve precise focusing performance with the MPA.

Original languageEnglish
Title of host publication10th International Conference on Progress of Machining Technology, ICPMT 2012
Pages245-248
Number of pages4
Publication statusPublished - 2012
Event10th International Conference on Progress of Machining Technology, ICPMT 2012 - Tsubame, Niigata, Japan
Duration: Sep 25 2012Sep 27 2012

Other

Other10th International Conference on Progress of Machining Technology, ICPMT 2012
CountryJapan
CityTsubame, Niigata
Period9/25/129/27/12

Fingerprint

Reactive ion etching
Prisms
Fabrication
Lenses
Intraocular lenses
Pickups
Optical devices
Masks
Etching
Experiments
Glass
Oxygen
Processing

Keywords

  • Micro-prism-array
  • Optical devices
  • Optical lens
  • Reactive ion etching

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

Cite this

Fujie, R., Okada, A., & Uno, Y. (2012). Applicability of reactive ion etching to fabrication of micro-prism-array for dioptrics system. In 10th International Conference on Progress of Machining Technology, ICPMT 2012 (pp. 245-248)

Applicability of reactive ion etching to fabrication of micro-prism-array for dioptrics system. / Fujie, Ryuto; Okada, Akira; Uno, Yoshiyuki.

10th International Conference on Progress of Machining Technology, ICPMT 2012. 2012. p. 245-248.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fujie, R, Okada, A & Uno, Y 2012, Applicability of reactive ion etching to fabrication of micro-prism-array for dioptrics system. in 10th International Conference on Progress of Machining Technology, ICPMT 2012. pp. 245-248, 10th International Conference on Progress of Machining Technology, ICPMT 2012, Tsubame, Niigata, Japan, 9/25/12.
Fujie R, Okada A, Uno Y. Applicability of reactive ion etching to fabrication of micro-prism-array for dioptrics system. In 10th International Conference on Progress of Machining Technology, ICPMT 2012. 2012. p. 245-248
Fujie, Ryuto ; Okada, Akira ; Uno, Yoshiyuki. / Applicability of reactive ion etching to fabrication of micro-prism-array for dioptrics system. 10th International Conference on Progress of Machining Technology, ICPMT 2012. 2012. pp. 245-248
@inproceedings{5964abf24e7d4830968549b1e65b3c43,
title = "Applicability of reactive ion etching to fabrication of micro-prism-array for dioptrics system",
abstract = "This study aims to develop a new lens system using an integrated arrangement of micro-prism-cell (MPC) and to obtain similar focusing performance as an optical lens. In this lens system, the respective prisms have different apex angle which is fabricated by precision processing. Further development of this system would make it possible to manufacture a multifocal lens in a small area, which leads to wide applications not only in optical devices, such as glasses and intraocular lenses, but also in pickup lenses for optical storage and so on. In this study, a new software was first developed to design a micro-prism-array (MPA), in which the apex angles of respective MPC were precisely computed. Based on the computed design, the photo-resist shape pattern was produced on trial by reactive ion etching (RIE). Then, the formation of a smooth prism slope was tried by using the resist mask whose shape was whittled away with an O2 (oxygen) RIE. Then, as a preliminary experiment, the apex angle was experimentally optimized with varying the etching conditions. In the experiment, the size of each MPC was set to 10μm, and the formation of the MPC, which had different apex angles ranging from zero to about 15° was achieved by four process stages of the RIE. A good focusing performance of the manufactured MPA could be obtained despite a diffusion of light. Nevertheless, the performance is not yet up to the specified design, and there remain some problems to be solved in order to achieve precise focusing performance with the MPA.",
keywords = "Micro-prism-array, Optical devices, Optical lens, Reactive ion etching",
author = "Ryuto Fujie and Akira Okada and Yoshiyuki Uno",
year = "2012",
language = "English",
isbn = "9781629930565",
pages = "245--248",
booktitle = "10th International Conference on Progress of Machining Technology, ICPMT 2012",

}

TY - GEN

T1 - Applicability of reactive ion etching to fabrication of micro-prism-array for dioptrics system

AU - Fujie, Ryuto

AU - Okada, Akira

AU - Uno, Yoshiyuki

PY - 2012

Y1 - 2012

N2 - This study aims to develop a new lens system using an integrated arrangement of micro-prism-cell (MPC) and to obtain similar focusing performance as an optical lens. In this lens system, the respective prisms have different apex angle which is fabricated by precision processing. Further development of this system would make it possible to manufacture a multifocal lens in a small area, which leads to wide applications not only in optical devices, such as glasses and intraocular lenses, but also in pickup lenses for optical storage and so on. In this study, a new software was first developed to design a micro-prism-array (MPA), in which the apex angles of respective MPC were precisely computed. Based on the computed design, the photo-resist shape pattern was produced on trial by reactive ion etching (RIE). Then, the formation of a smooth prism slope was tried by using the resist mask whose shape was whittled away with an O2 (oxygen) RIE. Then, as a preliminary experiment, the apex angle was experimentally optimized with varying the etching conditions. In the experiment, the size of each MPC was set to 10μm, and the formation of the MPC, which had different apex angles ranging from zero to about 15° was achieved by four process stages of the RIE. A good focusing performance of the manufactured MPA could be obtained despite a diffusion of light. Nevertheless, the performance is not yet up to the specified design, and there remain some problems to be solved in order to achieve precise focusing performance with the MPA.

AB - This study aims to develop a new lens system using an integrated arrangement of micro-prism-cell (MPC) and to obtain similar focusing performance as an optical lens. In this lens system, the respective prisms have different apex angle which is fabricated by precision processing. Further development of this system would make it possible to manufacture a multifocal lens in a small area, which leads to wide applications not only in optical devices, such as glasses and intraocular lenses, but also in pickup lenses for optical storage and so on. In this study, a new software was first developed to design a micro-prism-array (MPA), in which the apex angles of respective MPC were precisely computed. Based on the computed design, the photo-resist shape pattern was produced on trial by reactive ion etching (RIE). Then, the formation of a smooth prism slope was tried by using the resist mask whose shape was whittled away with an O2 (oxygen) RIE. Then, as a preliminary experiment, the apex angle was experimentally optimized with varying the etching conditions. In the experiment, the size of each MPC was set to 10μm, and the formation of the MPC, which had different apex angles ranging from zero to about 15° was achieved by four process stages of the RIE. A good focusing performance of the manufactured MPA could be obtained despite a diffusion of light. Nevertheless, the performance is not yet up to the specified design, and there remain some problems to be solved in order to achieve precise focusing performance with the MPA.

KW - Micro-prism-array

KW - Optical devices

KW - Optical lens

KW - Reactive ion etching

UR - http://www.scopus.com/inward/record.url?scp=84888140380&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84888140380&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84888140380

SN - 9781629930565

SP - 245

EP - 248

BT - 10th International Conference on Progress of Machining Technology, ICPMT 2012

ER -