An interpretation of unbalance vibration compensator for five-axes active magnetic bearing systems based on internal model principle

Taiki Nakamura, Shinji Wakui, Yukinori Nakamura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Five-axes active magnetic bearing (AMB) systems are widely utilized for the field of precision such as semiconductor exposure machines. This paper considers an interpretation of an unbalance vibration compensator PGC for five-axes AMB. As methods for the rejection of periodic disturbance, repetitive control and PIS control, which are based on internal model principle, have been known. The PIS control can be considered as a special case of the repetitive control. This paper investigates the relationship between the PGC and the PIS control from the similarity of the pole assignment and shows that the PGC suppresses the unbalance vibration from the perspective of the internal model principle.

Original languageEnglish
Title of host publication2015 International Conference on Advanced Mechatronic Systems, ICAMechS 2015
PublisherIEEE Computer Society
Pages137-142
Number of pages6
Volume2015-October
ISBN (Electronic)9781467379960
DOIs
Publication statusPublished - Oct 1 2015
Externally publishedYes
EventInternational Conference on Advanced Mechatronic Systems, ICAMechS 2015 - Beijing, China
Duration: Aug 22 2015Aug 24 2015

Other

OtherInternational Conference on Advanced Mechatronic Systems, ICAMechS 2015
CountryChina
CityBeijing
Period8/22/158/24/15

Fingerprint

Magnetic bearings
Poles
Semiconductor materials

Keywords

  • internal model principle
  • magnetic bearing
  • PGC
  • PIS control
  • repetitive control
  • unbalance vibration

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Nakamura, T., Wakui, S., & Nakamura, Y. (2015). An interpretation of unbalance vibration compensator for five-axes active magnetic bearing systems based on internal model principle. In 2015 International Conference on Advanced Mechatronic Systems, ICAMechS 2015 (Vol. 2015-October, pp. 137-142). [7287143] IEEE Computer Society. https://doi.org/10.1109/ICAMechS.2015.7287143

An interpretation of unbalance vibration compensator for five-axes active magnetic bearing systems based on internal model principle. / Nakamura, Taiki; Wakui, Shinji; Nakamura, Yukinori.

2015 International Conference on Advanced Mechatronic Systems, ICAMechS 2015. Vol. 2015-October IEEE Computer Society, 2015. p. 137-142 7287143.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nakamura, T, Wakui, S & Nakamura, Y 2015, An interpretation of unbalance vibration compensator for five-axes active magnetic bearing systems based on internal model principle. in 2015 International Conference on Advanced Mechatronic Systems, ICAMechS 2015. vol. 2015-October, 7287143, IEEE Computer Society, pp. 137-142, International Conference on Advanced Mechatronic Systems, ICAMechS 2015, Beijing, China, 8/22/15. https://doi.org/10.1109/ICAMechS.2015.7287143
Nakamura T, Wakui S, Nakamura Y. An interpretation of unbalance vibration compensator for five-axes active magnetic bearing systems based on internal model principle. In 2015 International Conference on Advanced Mechatronic Systems, ICAMechS 2015. Vol. 2015-October. IEEE Computer Society. 2015. p. 137-142. 7287143 https://doi.org/10.1109/ICAMechS.2015.7287143
Nakamura, Taiki ; Wakui, Shinji ; Nakamura, Yukinori. / An interpretation of unbalance vibration compensator for five-axes active magnetic bearing systems based on internal model principle. 2015 International Conference on Advanced Mechatronic Systems, ICAMechS 2015. Vol. 2015-October IEEE Computer Society, 2015. pp. 137-142
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