An integrated chemical sensor with multiple ion and gas sensors

K. Tsukada, Y. Miyahara, Y. Shibata, H. Miyagi

Research output: Contribution to journalArticle

39 Citations (Scopus)

Abstract

An integrated chemical sensor with multiple ion and gas sensors, composed of four ISFETs (pH, Na+, K+ and Cl-) and two gas sensors (PO2 and PCO2) on a 4 mm × 4 mm chip, is realized using semiconductor processing. The ISFETs are based on an Si3N4-gate ISFET, and use polymeric membrane except for the pH ISFET. The PO2 sensor is a miniaturized Clark-type sensor, consisting of a Pt cathode and Ag/AgCl anode patterned by the lift-off process. The PCO2 sensor is a miniaturized Severinghaus-type sensor using a pH ISFET. All of the ISFETs show sensitivities over 50 mV/decade, and a linear range between 1 × 10-4 and 5 × 10-1 mol/l. The sensitivities of the PO2 and PCO2 sensors are 0.35 nA/mmHg and 42 mV/decade, respectively, and their response times are 30 s and 1 min, respectively. The integrated chemical sensor with multiple ion and gas sensors could be used for clinical analysis.

Original languageEnglish
Pages (from-to)291-295
Number of pages5
JournalSensors and Actuators: B. Chemical
Volume2
Issue number4
DOIs
Publication statusPublished - Oct 1990
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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