An integrated chemical sensor with multiple ion and gas sensors

Keiji Tsukada, Y. Miyahara, Y. Shibata, H. Miyagi

Research output: Contribution to journalArticle

39 Citations (Scopus)

Abstract

An integrated chemical sensor with multiple ion and gas sensors, composed of four ISFETs (pH, Na+, K+ and Cl-) and two gas sensors (PO2 and PCO2 ) on a 4 mm × 4 mm chip, is realized using semiconductor processing. The ISFETs are based on an Si3N4-gate ISFET, and use polymeric membrane except for the pH ISFET. The PO2 sensor is a miniaturized Clark-type sensor, consisting of a Pt cathode and Ag/AgCl anode patterned by the lift-off process. The PCO2 sensor is a miniaturized Severinghaus-type sensor using a pH ISFET. All of the ISFETs show sensitivities over 50 mV/decade, and a linear range between 1 × 10-4 and 5 × 10-1 mol/l. The sensitivities of the PO2 and PCO2 sensors are 0.35 nA/mmHg and 42 mV/decade, respectively, and their response times are 30 s and 1 min, respectively. The integrated chemical sensor with multiple ion and gas sensors could be used for clinical analysis.

Original languageEnglish
Pages (from-to)291-295
Number of pages5
JournalSensors and Actuators, B: Chemical
Volume2
Issue number4
DOIs
Publication statusPublished - 1990
Externally publishedYes

Fingerprint

Ion sensitive field effect transistors
Chemical sensors
Ions
sensors
gases
Sensors
ions
Gates (transistor)
Polymeric membranes
Anodes
Cathodes
Semiconductor materials
sensitivity
Processing
anodes
cathodes
chips

ASJC Scopus subject areas

  • Analytical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

Cite this

An integrated chemical sensor with multiple ion and gas sensors. / Tsukada, Keiji; Miyahara, Y.; Shibata, Y.; Miyagi, H.

In: Sensors and Actuators, B: Chemical, Vol. 2, No. 4, 1990, p. 291-295.

Research output: Contribution to journalArticle

Tsukada, Keiji ; Miyahara, Y. ; Shibata, Y. ; Miyagi, H. / An integrated chemical sensor with multiple ion and gas sensors. In: Sensors and Actuators, B: Chemical. 1990 ; Vol. 2, No. 4. pp. 291-295.
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