Abstract
An integrated chemical sensor with multiple ion and gas sensors, composed of four ISFETs (pH, Na+, K+ and Cl-) and two gas sensors (PO2 and PCO2 ) on a 4 mm × 4 mm chip, is realized using semiconductor processing. The ISFETs are based on an Si3N4-gate ISFET, and use polymeric membrane except for the pH ISFET. The PO2 sensor is a miniaturized Clark-type sensor, consisting of a Pt cathode and Ag/AgCl anode patterned by the lift-off process. The PCO2 sensor is a miniaturized Severinghaus-type sensor using a pH ISFET. All of the ISFETs show sensitivities over 50 mV/decade, and a linear range between 1 × 10-4 and 5 × 10-1 mol/l. The sensitivities of the PO2 and PCO2 sensors are 0.35 nA/mmHg and 42 mV/decade, respectively, and their response times are 30 s and 1 min, respectively. The integrated chemical sensor with multiple ion and gas sensors could be used for clinical analysis.
| Original language | English |
|---|---|
| Pages (from-to) | 291-295 |
| Number of pages | 5 |
| Journal | Sensors and Actuators, B: Chemical |
| Volume | 2 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 1990 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Analytical Chemistry
- Electrochemistry
- Electrical and Electronic Engineering
Cite this
An integrated chemical sensor with multiple ion and gas sensors. / Tsukada, Keiji; Miyahara, Y.; Shibata, Y.; Miyagi, H.
In: Sensors and Actuators, B: Chemical, Vol. 2, No. 4, 1990, p. 291-295.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - An integrated chemical sensor with multiple ion and gas sensors
AU - Tsukada, Keiji
AU - Miyahara, Y.
AU - Shibata, Y.
AU - Miyagi, H.
PY - 1990
Y1 - 1990
N2 - An integrated chemical sensor with multiple ion and gas sensors, composed of four ISFETs (pH, Na+, K+ and Cl-) and two gas sensors (PO2 and PCO2 ) on a 4 mm × 4 mm chip, is realized using semiconductor processing. The ISFETs are based on an Si3N4-gate ISFET, and use polymeric membrane except for the pH ISFET. The PO2 sensor is a miniaturized Clark-type sensor, consisting of a Pt cathode and Ag/AgCl anode patterned by the lift-off process. The PCO2 sensor is a miniaturized Severinghaus-type sensor using a pH ISFET. All of the ISFETs show sensitivities over 50 mV/decade, and a linear range between 1 × 10-4 and 5 × 10-1 mol/l. The sensitivities of the PO2 and PCO2 sensors are 0.35 nA/mmHg and 42 mV/decade, respectively, and their response times are 30 s and 1 min, respectively. The integrated chemical sensor with multiple ion and gas sensors could be used for clinical analysis.
AB - An integrated chemical sensor with multiple ion and gas sensors, composed of four ISFETs (pH, Na+, K+ and Cl-) and two gas sensors (PO2 and PCO2 ) on a 4 mm × 4 mm chip, is realized using semiconductor processing. The ISFETs are based on an Si3N4-gate ISFET, and use polymeric membrane except for the pH ISFET. The PO2 sensor is a miniaturized Clark-type sensor, consisting of a Pt cathode and Ag/AgCl anode patterned by the lift-off process. The PCO2 sensor is a miniaturized Severinghaus-type sensor using a pH ISFET. All of the ISFETs show sensitivities over 50 mV/decade, and a linear range between 1 × 10-4 and 5 × 10-1 mol/l. The sensitivities of the PO2 and PCO2 sensors are 0.35 nA/mmHg and 42 mV/decade, respectively, and their response times are 30 s and 1 min, respectively. The integrated chemical sensor with multiple ion and gas sensors could be used for clinical analysis.
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U2 - 10.1016/0925-4005(90)80156-T
DO - 10.1016/0925-4005(90)80156-T
M3 - Article
AN - SCOPUS:0025502653
VL - 2
SP - 291
EP - 295
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
SN - 0925-4005
IS - 4
ER -