An integrated chemical sensor with multiple ion and gas sensors

K. Tsukada; Y. Miyahara; Y. Shibata; H. Miyagi

doi:10.1016/0925-4005(90)80156-T

An integrated chemical sensor with multiple ion and gas sensors

K. Tsukada, Y. Miyahara, Y. Shibata, H. Miyagi

Research output: Contribution to journal › Article

39 Citations (Scopus)

Abstract

An integrated chemical sensor with multiple ion and gas sensors, composed of four ISFETs (pH, Na⁺, K⁺ and Cl^-) and two gas sensors (P_O₂ and P_CO₂) on a 4 mm × 4 mm chip, is realized using semiconductor processing. The ISFETs are based on an Si₃N₄-gate ISFET, and use polymeric membrane except for the pH ISFET. The P_O₂ sensor is a miniaturized Clark-type sensor, consisting of a Pt cathode and Ag/AgCl anode patterned by the lift-off process. The P_CO₂ sensor is a miniaturized Severinghaus-type sensor using a pH ISFET. All of the ISFETs show sensitivities over 50 mV/decade, and a linear range between 1 × 10^-4 and 5 × 10^-1 mol/l. The sensitivities of the P_O₂ and P_CO₂ sensors are 0.35 nA/mmHg and 42 mV/decade, respectively, and their response times are 30 s and 1 min, respectively. The integrated chemical sensor with multiple ion and gas sensors could be used for clinical analysis.

Original language	English
Pages (from-to)	291-295
Number of pages	5
Journal	Sensors and Actuators: B. Chemical
Volume	2
Issue number	4
DOIs	https://doi.org/10.1016/0925-4005(90)80156-T
Publication status	Published - Oct 1990
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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Tsukada, K., Miyahara, Y., Shibata, Y., & Miyagi, H. (1990). An integrated chemical sensor with multiple ion and gas sensors. Sensors and Actuators: B. Chemical, 2(4), 291-295. https://doi.org/10.1016/0925-4005(90)80156-T

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abstract = "An integrated chemical sensor with multiple ion and gas sensors, composed of four ISFETs (pH, Na+, K+ and Cl-) and two gas sensors (PO2 and PCO2) on a 4 mm × 4 mm chip, is realized using semiconductor processing. The ISFETs are based on an Si3N4-gate ISFET, and use polymeric membrane except for the pH ISFET. The PO2 sensor is a miniaturized Clark-type sensor, consisting of a Pt cathode and Ag/AgCl anode patterned by the lift-off process. The PCO2 sensor is a miniaturized Severinghaus-type sensor using a pH ISFET. All of the ISFETs show sensitivities over 50 mV/decade, and a linear range between 1 × 10-4 and 5 × 10-1 mol/l. The sensitivities of the PO2 and PCO2 sensors are 0.35 nA/mmHg and 42 mV/decade, respectively, and their response times are 30 s and 1 min, respectively. The integrated chemical sensor with multiple ion and gas sensors could be used for clinical analysis.",

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N2 - An integrated chemical sensor with multiple ion and gas sensors, composed of four ISFETs (pH, Na+, K+ and Cl-) and two gas sensors (PO2 and PCO2) on a 4 mm × 4 mm chip, is realized using semiconductor processing. The ISFETs are based on an Si3N4-gate ISFET, and use polymeric membrane except for the pH ISFET. The PO2 sensor is a miniaturized Clark-type sensor, consisting of a Pt cathode and Ag/AgCl anode patterned by the lift-off process. The PCO2 sensor is a miniaturized Severinghaus-type sensor using a pH ISFET. All of the ISFETs show sensitivities over 50 mV/decade, and a linear range between 1 × 10-4 and 5 × 10-1 mol/l. The sensitivities of the PO2 and PCO2 sensors are 0.35 nA/mmHg and 42 mV/decade, respectively, and their response times are 30 s and 1 min, respectively. The integrated chemical sensor with multiple ion and gas sensors could be used for clinical analysis.

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