Abstract
An integrated chemical sensor with multiple ion and gas sensors, composed of four ISFETs (pH, Na+, K+ and Cl-) and two gas sensors (PO2 and PCO2) on a 4 mm × 4 mm chip, is realized using semiconductor processing. The ISFETs are based on an Si3N4-gate ISFET, and use polymeric membrane except for the pH ISFET. The PO2 sensor is a miniaturized Clark-type sensor, consisting of a Pt cathode and Ag/AgCl anode patterned by the lift-off process. The PCO2 sensor is a miniaturized Severinghaus-type sensor using a pH ISFET. All of the ISFETs show sensitivities over 50 mV/decade, and a linear range between 1 × 10-4 and 5 × 10-1 mol/l. The sensitivities of the PO2 and PCO2 sensors are 0.35 nA/mmHg and 42 mV/decade, respectively, and their response times are 30 s and 1 min, respectively. The integrated chemical sensor with multiple ion and gas sensors could be used for clinical analysis.
Original language | English |
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Pages (from-to) | 291-295 |
Number of pages | 5 |
Journal | Sensors and Actuators: B. Chemical |
Volume | 2 |
Issue number | 4 |
DOIs | |
Publication status | Published - Oct 1990 |
Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
- Materials Chemistry