Alumina based low permittivity substrate utilizing superplastically foaming method

Miyo Wakiyama, Hidetaka Hayashi, Akira Kishimoto

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Alumina based closed pore dominated substrates have been fabricated by using superplastically foaming method developed by our group. Co-dispersing of magnesium aluminate spinel (Spinel) and zirconia without dopant (0YZ) provided adequate superplastisity to alumina matrix, while individual dispersion of spinel or zirconia resulted in only small deformation. The dielectric constant of superplastically foamed alumina decreased monotonically with porosity. Introduced pores were all closed nature at least up to 30%of porosity, at that porosity the permittivity became half as that of full dense one. Effect of the sweating water or ambient humidity has been proved to be identical to those of full dense one, which is favorable for semiconductor substrate.

Original languageEnglish
Pages (from-to)1090-1093
Number of pages4
JournalJournal of the Ceramic Society of Japan
Volume118
Issue number1383
DOIs
Publication statusPublished - Nov 2010

Keywords

  • Alumina
  • Closed pore
  • Dielectric constant
  • Humidity
  • Superplasticity

ASJC Scopus subject areas

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry

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