Alumina based low permittivity substrate utilizing superplastically foaming method

Miyo Wakiyama, Hidetaka Hayashi, Akira Kishimoto

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Alumina based closed pore dominated substrates have been fabricated by using superplastically foaming method developed by our group. Co-dispersing of magnesium aluminate spinel (Spinel) and zirconia without dopant (0YZ) provided adequate superplastisity to alumina matrix, while individual dispersion of spinel or zirconia resulted in only small deformation. The dielectric constant of superplastically foamed alumina decreased monotonically with porosity. Introduced pores were all closed nature at least up to 30%of porosity, at that porosity the permittivity became half as that of full dense one. Effect of the sweating water or ambient humidity has been proved to be identical to those of full dense one, which is favorable for semiconductor substrate.

Original languageEnglish
Pages (from-to)1090-1093
Number of pages4
JournalNippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
Volume118
Issue number1383
Publication statusPublished - Nov 2010

Fingerprint

foaming
Aluminum Oxide
Permittivity
Alumina
aluminum oxides
Porosity
permittivity
porosity
Zirconia
spinel
Substrates
zirconium oxides
perspiration
Magnesium
Atmospheric humidity
Doping (additives)
Semiconductor materials
dispersing
Water
humidity

Keywords

  • Alumina
  • Closed pore
  • Dielectric constant
  • Humidity
  • Superplasticity

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry
  • Chemistry(all)
  • Condensed Matter Physics

Cite this

Alumina based low permittivity substrate utilizing superplastically foaming method. / Wakiyama, Miyo; Hayashi, Hidetaka; Kishimoto, Akira.

In: Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan, Vol. 118, No. 1383, 11.2010, p. 1090-1093.

Research output: Contribution to journalArticle

@article{229421a544ab4677b9d19d90e6155a4b,
title = "Alumina based low permittivity substrate utilizing superplastically foaming method",
abstract = "Alumina based closed pore dominated substrates have been fabricated by using superplastically foaming method developed by our group. Co-dispersing of magnesium aluminate spinel (Spinel) and zirconia without dopant (0YZ) provided adequate superplastisity to alumina matrix, while individual dispersion of spinel or zirconia resulted in only small deformation. The dielectric constant of superplastically foamed alumina decreased monotonically with porosity. Introduced pores were all closed nature at least up to 30{\%}of porosity, at that porosity the permittivity became half as that of full dense one. Effect of the sweating water or ambient humidity has been proved to be identical to those of full dense one, which is favorable for semiconductor substrate.",
keywords = "Alumina, Closed pore, Dielectric constant, Humidity, Superplasticity",
author = "Miyo Wakiyama and Hidetaka Hayashi and Akira Kishimoto",
year = "2010",
month = "11",
language = "English",
volume = "118",
pages = "1090--1093",
journal = "Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan",
issn = "1882-0743",
publisher = "Ceramic Society of Japan/Nippon Seramikkusu Kyokai",
number = "1383",

}

TY - JOUR

T1 - Alumina based low permittivity substrate utilizing superplastically foaming method

AU - Wakiyama, Miyo

AU - Hayashi, Hidetaka

AU - Kishimoto, Akira

PY - 2010/11

Y1 - 2010/11

N2 - Alumina based closed pore dominated substrates have been fabricated by using superplastically foaming method developed by our group. Co-dispersing of magnesium aluminate spinel (Spinel) and zirconia without dopant (0YZ) provided adequate superplastisity to alumina matrix, while individual dispersion of spinel or zirconia resulted in only small deformation. The dielectric constant of superplastically foamed alumina decreased monotonically with porosity. Introduced pores were all closed nature at least up to 30%of porosity, at that porosity the permittivity became half as that of full dense one. Effect of the sweating water or ambient humidity has been proved to be identical to those of full dense one, which is favorable for semiconductor substrate.

AB - Alumina based closed pore dominated substrates have been fabricated by using superplastically foaming method developed by our group. Co-dispersing of magnesium aluminate spinel (Spinel) and zirconia without dopant (0YZ) provided adequate superplastisity to alumina matrix, while individual dispersion of spinel or zirconia resulted in only small deformation. The dielectric constant of superplastically foamed alumina decreased monotonically with porosity. Introduced pores were all closed nature at least up to 30%of porosity, at that porosity the permittivity became half as that of full dense one. Effect of the sweating water or ambient humidity has been proved to be identical to those of full dense one, which is favorable for semiconductor substrate.

KW - Alumina

KW - Closed pore

KW - Dielectric constant

KW - Humidity

KW - Superplasticity

UR - http://www.scopus.com/inward/record.url?scp=78149316492&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=78149316492&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:78149316492

VL - 118

SP - 1090

EP - 1093

JO - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan

JF - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan

SN - 1882-0743

IS - 1383

ER -