Accuracy improvement in contact type of on-the machine measurement system

H. Suzuki; T. Onishi; T. Moriwaki; T. Okino; Y. Hijikata; J. Sugawara; M. Fukuta

Accuracy improvement in contact type of on-the machine measurement system

H. Suzuki, T. Onishi, T. Moriwaki, T. Okino, Y. Hijikata, J. Sugawara, M. Fukuta

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this research, a new contact type of on-the machine measurement system is proposed and developed to precisely measure aspherical surfaces with large NA. The measuring probe scans the workpiece surface with a tilting angle of 45 degrees to the normal vector of the surface in order to keep the probe contact force constant. The air slide table is made of light SIALON ceramic, which has a high rigidly and a low thermal expansion. A linear glass scale system of 0.14 nm in resolution was used as a sensor. The measurement accuracy of the proposed system was simulated and evaluated experimentally compared with the conventional method.

Original language	English
Title of host publication	Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007
Editors	E. Thornett
Publisher	euspen
Pages	234-241
Number of pages	8
ISBN (Electronic)	0955308224, 9780955308222
Publication status	Published - Jan 1 2007
Externally published	Yes
Event	7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007 - Bremen, Germany Duration: May 20 2007 → May 24 2007

Publication series

Name	Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007
Volume	1

Other

Other	7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007
Country/Territory	Germany
City	Bremen
Period	5/20/07 → 5/24/07

ASJC Scopus subject areas

Materials Science(all)
Instrumentation
Environmental Engineering
Industrial and Manufacturing Engineering
Mechanical Engineering

Cite this

Suzuki, H., Onishi, T., Moriwaki, T., Okino, T., Hijikata, Y., Sugawara, J., & Fukuta, M. (2007). Accuracy improvement in contact type of on-the machine measurement system. In E. Thornett (Ed.), Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007 (pp. 234-241). (Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007; Vol. 1). euspen.

Accuracy improvement in contact type of on-the machine measurement system. / Suzuki, H.; Onishi, T.; Moriwaki, T. et al.

Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007. ed. / E. Thornett. euspen, 2007. p. 234-241 (Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Suzuki, H, Onishi, T, Moriwaki, T, Okino, T, Hijikata, Y, Sugawara, J & Fukuta, M 2007, Accuracy improvement in contact type of on-the machine measurement system. in E Thornett (ed.), Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007. Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007, vol. 1, euspen, pp. 234-241, 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007, Bremen, Germany, 5/20/07.

Suzuki H, Onishi T, Moriwaki T, Okino T, Hijikata Y, Sugawara J et al. Accuracy improvement in contact type of on-the machine measurement system. In Thornett E, editor, Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007. euspen. 2007. p. 234-241. (Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007).

Suzuki, H. ; Onishi, T. ; Moriwaki, T. et al. / Accuracy improvement in contact type of on-the machine measurement system. Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007. editor / E. Thornett. euspen, 2007. pp. 234-241 (Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007).

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abstract = "In this research, a new contact type of on-the machine measurement system is proposed and developed to precisely measure aspherical surfaces with large NA. The measuring probe scans the workpiece surface with a tilting angle of 45 degrees to the normal vector of the surface in order to keep the probe contact force constant. The air slide table is made of light SIALON ceramic, which has a high rigidly and a low thermal expansion. A linear glass scale system of 0.14 nm in resolution was used as a sensor. The measurement accuracy of the proposed system was simulated and evaluated experimentally compared with the conventional method.",

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AB - In this research, a new contact type of on-the machine measurement system is proposed and developed to precisely measure aspherical surfaces with large NA. The measuring probe scans the workpiece surface with a tilting angle of 45 degrees to the normal vector of the surface in order to keep the probe contact force constant. The air slide table is made of light SIALON ceramic, which has a high rigidly and a low thermal expansion. A linear glass scale system of 0.14 nm in resolution was used as a sensor. The measurement accuracy of the proposed system was simulated and evaluated experimentally compared with the conventional method.

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Accuracy improvement in contact type of on-the machine measurement system

Abstract

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ASJC Scopus subject areas

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