Accuracy improvement in contact type of on-the machine measurement system

H. Suzuki, T. Onishi, T. Moriwaki, T. Okino, Y. Hijikata, J. Sugawara, M. Fukuta

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this research, a new contact type of on-the machine measurement system is proposed and developed to precisely measure aspherical surfaces with large NA. The measuring probe scans the workpiece surface with a tilting angle of 45 degrees to the normal vector of the surface in order to keep the probe contact force constant. The air slide table is made of light SIALON ceramic, which has a high rigidly and a low thermal expansion. A linear glass scale system of 0.14 nm in resolution was used as a sensor. The measurement accuracy of the proposed system was simulated and evaluated experimentally compared with the conventional method.

Original languageEnglish
Title of host publicationProceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007
EditorsE. Thornett
Publishereuspen
Pages234-241
Number of pages8
ISBN (Electronic)0955308224, 9780955308222
Publication statusPublished - Jan 1 2007
Externally publishedYes
Event7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007 - Bremen, Germany
Duration: May 20 2007May 24 2007

Publication series

NameProceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007
Volume1

Other

Other7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007
CountryGermany
CityBremen
Period5/20/075/24/07

ASJC Scopus subject areas

  • Materials Science(all)
  • Instrumentation
  • Environmental Engineering
  • Industrial and Manufacturing Engineering
  • Mechanical Engineering

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  • Cite this

    Suzuki, H., Onishi, T., Moriwaki, T., Okino, T., Hijikata, Y., Sugawara, J., & Fukuta, M. (2007). Accuracy improvement in contact type of on-the machine measurement system. In E. Thornett (Ed.), Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007 (pp. 234-241). (Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007; Vol. 1). euspen.