Accuracy improvement in contact type of on-the machine measurement system

H. Suzuki, Takashi Onishi, T. Moriwaki, T. Okino, Y. Hijikata, J. Sugawara, M. Fukuta

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this research, a new contact type of on-the machine measurement system is proposed and developed to precisely measure aspherical surfaces with large NA. The measuring probe scans the workpiece surface with a tilting angle of 45 degrees to the normal vector of the surface in order to keep the probe contact force constant. The air slide table is made of light SIALON ceramic, which has a high rigidly and a low thermal expansion. A linear glass scale system of 0.14 nm in resolution was used as a sensor. The measurement accuracy of the proposed system was simulated and evaluated experimentally compared with the conventional method.

Original languageEnglish
Title of host publicationProceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007
Publishereuspen
Pages234-241
Number of pages8
Volume1
ISBN (Print)0955308224, 9780955308222
Publication statusPublished - 2007
Externally publishedYes
Event7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007 - Bremen, Germany
Duration: May 20 2007May 24 2007

Other

Other7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007
CountryGermany
CityBremen
Period5/20/075/24/07

Fingerprint

probes
chutes
Contacts (fluid mechanics)
Thermal expansion
thermal expansion
ceramics
Glass
glass
sensors
air
Sensors
Air

ASJC Scopus subject areas

  • Materials Science(all)
  • Instrumentation
  • Environmental Engineering
  • Industrial and Manufacturing Engineering
  • Mechanical Engineering

Cite this

Suzuki, H., Onishi, T., Moriwaki, T., Okino, T., Hijikata, Y., Sugawara, J., & Fukuta, M. (2007). Accuracy improvement in contact type of on-the machine measurement system. In Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007 (Vol. 1, pp. 234-241). euspen.

Accuracy improvement in contact type of on-the machine measurement system. / Suzuki, H.; Onishi, Takashi; Moriwaki, T.; Okino, T.; Hijikata, Y.; Sugawara, J.; Fukuta, M.

Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007. Vol. 1 euspen, 2007. p. 234-241.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Suzuki, H, Onishi, T, Moriwaki, T, Okino, T, Hijikata, Y, Sugawara, J & Fukuta, M 2007, Accuracy improvement in contact type of on-the machine measurement system. in Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007. vol. 1, euspen, pp. 234-241, 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007, Bremen, Germany, 5/20/07.
Suzuki H, Onishi T, Moriwaki T, Okino T, Hijikata Y, Sugawara J et al. Accuracy improvement in contact type of on-the machine measurement system. In Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007. Vol. 1. euspen. 2007. p. 234-241
Suzuki, H. ; Onishi, Takashi ; Moriwaki, T. ; Okino, T. ; Hijikata, Y. ; Sugawara, J. ; Fukuta, M. / Accuracy improvement in contact type of on-the machine measurement system. Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007. Vol. 1 euspen, 2007. pp. 234-241
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