A Role of Base Plate Jerk Feedback Scheme for Suppression of the Self Vibration in a Pneumatic Positioning Stage

Wali Mohebullah, Yukinori Nakamura, Shinji Wakui

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)252-259
JournalJournal of Advanced Mechanical Design, Systems and Manufacturing
Volume6
Issue number2
Publication statusPublished - Feb 2012

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