A rod-shaped vibro touch sensor using PZT thin film

Takefumi Kanda, Takeshi Morita, Minoru Kuribayashi Kurosawa, Toshiro Higuchi

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

We have fabricated a probe sensor. This sensor is for high precision coordinate measuring machines, surface roughness measuring tools, or scanning probe microscopes (SPM). This sensor consists of a rod vibrating in the axial direction. The longitudinal vibration was excited and also detected by PZT thin film. The PZT thin Him was fabricated by a hydrothermal method. The hydrothermal method uses the reaction process in hot and high pressure aqueous solutions. We made a 27.8-mm long sensor. Its resonance frequency was 116 kHz. The sensitivity and resolution were evaluated by experiments. We succeeded in oscillating the rod and detecting the contact.

Original languageEnglish
Pages (from-to)875-882
Number of pages8
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume46
Issue number4
DOIs
Publication statusPublished - Jul 1999
Externally publishedYes

Fingerprint

touch
rods
Thin films
sensors
Sensors
thin films
Coordinate measuring machines
probes
surface roughness
Microscopes
Surface roughness
microscopes
aqueous solutions
Scanning
vibration
scanning
sensitivity
Experiments

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Acoustics and Ultrasonics

Cite this

A rod-shaped vibro touch sensor using PZT thin film. / Kanda, Takefumi; Morita, Takeshi; Kurosawa, Minoru Kuribayashi; Higuchi, Toshiro.

In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 46, No. 4, 07.1999, p. 875-882.

Research output: Contribution to journalArticle

Kanda, Takefumi ; Morita, Takeshi ; Kurosawa, Minoru Kuribayashi ; Higuchi, Toshiro. / A rod-shaped vibro touch sensor using PZT thin film. In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 1999 ; Vol. 46, No. 4. pp. 875-882.
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