A New Slicing Method of Monocrystalline Silicon lngot by Wire EDM

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)14-21
Number of pages8
JournalJournal of the Japan Society of Electrical Machining Engineers
Volume34
Issue number75
Publication statusPublished - 2000

Cite this

A New Slicing Method of Monocrystalline Silicon lngot by Wire EDM. / Okada, Akira.

In: Journal of the Japan Society of Electrical Machining Engineers, Vol. 34, No. 75, 2000, p. 14-21.

Research output: Contribution to journalArticle

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language = "English",
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journal = "Journal of the Japan Society of Electrical Machining Engineers",
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EP - 21

JO - Journal of the Japan Society of Electrical Machining Engineers

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