A New Micro EDM Technique of Monocrystalline Silicon using Fine Triangular Electrode

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)381-389
Number of pages9
JournalProceedings of the 13th International Symposium for Electromahining
Publication statusPublished - 2001

Cite this

@article{ead6d86bd3b34141bf5d39b92d794997,
title = "A New Micro EDM Technique of Monocrystalline Silicon using Fine Triangular Electrode",
author = "Yasuhiro Okamoto",
year = "2001",
language = "English",
pages = "381--389",
journal = "Proceedings of the 13th International Symposium for Electromahining",

}

TY - JOUR

T1 - A New Micro EDM Technique of Monocrystalline Silicon using Fine Triangular Electrode

AU - Okamoto, Yasuhiro

PY - 2001

Y1 - 2001

M3 - Article

SP - 381

EP - 389

JO - Proceedings of the 13th International Symposium for Electromahining

JF - Proceedings of the 13th International Symposium for Electromahining

ER -