A new deadlock prevention policy for multi-cluster tools with dual path

Yushin Watanabe, Tatsushi Nishi

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)

Abstract

Multi-cluster tools are widely used for semiconductor silicon wafer production. The multi-cluster tools system consists of two or more cluster tools connected with buffer or process modules. Deadlocks are frequently caused in the multicluster tools by the restriction of transfer modules and limited number of available spaces. In this paper, we propose a novel deadlock prevention policy for multi-cluster tools. A timed Petri net model for multi-cluster tools is developed. A new deadlock prevention policy is proposed. The proposed deadlock prevention policy is applied to dual-armed multi-cluster tool with dual path. The deadlock-freeness is confirmed by deriving empty siphons for the Petri net model. The computational results show that the performance of scheduling with the proposed deadlock prevention policy is better than the conventional deadlock prevention policy.

Original languageEnglish
Article number6974099
Pages (from-to)1330-1335
Number of pages6
JournalConference Proceedings - IEEE International Conference on Systems, Man and Cybernetics
Volume2014-January
Issue numberJanuary
DOIs
Publication statusPublished - 2014
Event2014 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2014 - San Diego, United States
Duration: Oct 5 2014Oct 8 2014

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Control and Systems Engineering
  • Human-Computer Interaction

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