A method using the base plate jerk feedback to control the positioning of a pneumatic stage Control of the stage vibration caused by the reaction force

Mohebullah Wali, Yukinori Nakamura, Shinji Wakui

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, a pneumatic positioning stage is considered. The stage is moved by the driving force and the reaction force leads the base plate to vibrate, resulting in the fluctuation of the stage in the opposite direction. In order to reduce the effect of the reaction force and improve the positioning time, the base plate jerk feedback is proposed. This feedback is firstly realized using an external force exerted to the base plate and then applied for the real condition of positioning. The experimental results show the effectiveness of the proposed method.

Original languageEnglish
Title of host publicationASCC 2011 - 8th Asian Control Conference - Final Program and Proceedings
Pages629-634
Number of pages6
Publication statusPublished - 2011
Externally publishedYes
Event8th Asian Control Conference, ASCC 2011 - Kaohsiung, Taiwan, Province of China
Duration: May 15 2011May 18 2011

Other

Other8th Asian Control Conference, ASCC 2011
CountryTaiwan, Province of China
CityKaohsiung
Period5/15/115/18/11

    Fingerprint

Keywords

  • base plate
  • coil-type spring isolator
  • jerk feedback
  • PDD compensator
  • perfect integrator
  • pneumatic stage
  • positioning

ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Wali, M., Nakamura, Y., & Wakui, S. (2011). A method using the base plate jerk feedback to control the positioning of a pneumatic stage Control of the stage vibration caused by the reaction force. In ASCC 2011 - 8th Asian Control Conference - Final Program and Proceedings (pp. 629-634). [5899145]